Leakage detection device and detection method using same

A detection device and liquid level technology, applied in the field of leak detection, can solve the problems of waste liquid corrosion, high use cost, inability to distinguish the wet condition of the tank floor, etc., to monitor abnormal discharge, reduce labor load, and reduce hardware investment and the effect of running costs

Inactive Publication Date: 2012-03-14
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1
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Problems solved by technology

[0012] The purpose of the present invention is to provide a leakage detection device and detection method to solve the problem that the existing wastewater lifting station uses a leakage detector for leakage detection, and the leakage detector is easily corroded by the discharged waste liquid and becomes invalid , and it is impossible to distinguish the wetness of the ground caused by the large tank leak and dripping condensed water, and the problem of high cost of use

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  • Leakage detection device and detection method using same
  • Leakage detection device and detection method using same
  • Leakage detection device and detection method using same

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Embodiment Construction

[0036] The leakage detection device and detection method proposed by the present invention will be further described in detail below in conjunction with the drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in very simplified form and use imprecise ratios, which are only used for the purpose of conveniently and clearly assisting in describing the embodiments of the present invention.

[0037] The core idea of ​​the present invention is to provide a leakage detection device, which includes a liquid level gauge, a data acquisition and monitoring control device, and a control device. Compare the absolute value of the rate of change to determine whether a large leak occurs, and then send an alarm, thereby eliminating the false alarm of the leak detector in the prior art, increasing the stability of the system, and can monitor a large number of ...

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Abstract

The invention discloses a leakage detection device. The device comprises a liquidometer, a data collecting and monitoring control device and control equipment. According to the leakage detection device, an absolute value of an actual relative liquid level change rate is compared with an absolute value of a standard relative liquid level change rate to judge whether large leakage occurs, and then an alarm is given. Therefore, the false alarm of the leakage detector in the prior art is eliminated, the system stability is increased, and a large amount of leakage can be relatively accurately monitored. Meanwhile, the invention further provides a method for detecting waste water leakage. In the method, a measuring value of the liquidometer is collected through the data collecting and monitoring control device; and meanwhile, the actual relative liquid level change rate of a barrel tank is calculated by using the control equipment, and the absolute value of the actual relative liquid level change rate is compared with the absolute value of the standard relative liquid level change rate to judge whether the large leakage occurs, and then the alarm is given. The method is simple and reliable.

Description

technical field [0001] The invention relates to the technical field of leak detection, in particular to a leak detection device and a detection method. Background technique [0002] Semiconductor chip manufacturing is a cutting-edge technology industry, but it is also an industry that consumes a lot of water and produces a lot of industrial wastewater. The sources of wastewater in semiconductor chip manufacturing plants can be roughly divided into chemical wastewater, pure water system wastewater, and process wastewater. [0003] The waste water is generally collected and treated through the waste water lifting station. The waste water lifting station is the area where the factory collects various production and drainage in the clean room, and is generally located in the basement or semi-basement. Dozens of collection tanks for different types of chemicals, waste water and waste liquid are arranged in the waste water lifting station, and the collection tanks are used to col...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/26
Inventor 张云秀王兴宇厉晓华
Owner SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP
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