Calibration apparatus for laser micro energy

A micro-energy and laser technology, applied in the field of optical metrology, can solve the problem of difficult separation of laser signal and electromagnetic noise, stray light noise, etc., and achieve the effects of stable waveform, avoiding high-frequency noise, and high stability

Active Publication Date: 2012-03-28
CHINA NORTH IND NO 205 RES INST
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Problems solved by technology

This method has the problem that it is difficult to separate the laser signal from the electromagnetic noise and stray light noise in the actual measurement.

Method used

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  • Calibration apparatus for laser micro energy
  • Calibration apparatus for laser micro energy
  • Calibration apparatus for laser micro energy

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Embodiment Construction

[0018] The present invention will be further described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0019] according to figure 1 As shown, the laser micro-energy standard device in the preferred embodiment of the present invention includes a standard laser light source 1, a pulse generator assembly 2, a measurement assembly 3, a drive circuit 4, a computer system 5 equipped with a laser micro-energy calibration software package, and a standard laser The light source 1, the pulse generator assembly 2, and the measurement assembly 3 are placed on a grounded optical platform. The standard laser light source 1 is a continuous laser with a wavelength of 1.06 μm, or a continuous laser with a wavelength of 0.532 μm, 0.905 μm, 10.6 μm or other wavelengths.

[0020]The pulse generator assembly 2 includes a focusing lens 2-1, a first chopper 2-2, a second chopper 2-3, a collimating lens 2-4, a protective cover 2-5, a DC motor drive and cont...

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Abstract

The invention, which belongs to the optical metrology field, discloses a calibration apparatus for laser micro energy, wherein the apparatus is used for calibration of a laser micro energy meter. The calibration apparatus comprises a calibrated laser light source, a pulse generator assembly, a measurement assembly and a computer system. The pulse generator assembly includes two choppers having different rotating speeds and clear apertures, so that continuous lasers output by the calibrated laser light source are chopped into pulse lasers with low repetition rates and low duty ratios. Besides,the measurement assembly uses two different detectors to respectively measure laser powers and pulse widths of the pulse lasers; and the computer system utilizes built-in software to collect measuring signals of the measurement assembly and a micro energy meter with calibration; and corresponded calculating formulas are employed to obtain calibration parameters. According to the invention, magnitude recurrence and magnitude transmission of laser micro energy are realized; and accurate recurrence can be carried out on laser energy with 1 muJ to 0.1 pJ.

Description

technical field [0001] The invention belongs to the field of optical metrology, and mainly relates to a laser energy standard device, in particular to a laser micro-energy standard device capable of calibrating a laser micro-energy meter. Background technique [0002] Laser micro-energy is an important parameter for evaluating laser receiving systems and laser micro-energy detection standard instruments, and is measured by a laser micro-energy meter. For the accuracy and uniformity of the value, a laser micro-energy standard device is needed to calibrate the laser micro-energy meter. The measurement methods used in traditional laser micro-energy measurement devices mainly include wedge beam splitter method, acousto-optic crystal modulation method, high repetition frequency pulsed laser method and standard attenuator attenuation method. [0003] The wedge-shaped beam splitter method is traced back to the amount of laser energy. It uses the different levels of reflected (tran...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/00
Inventor 黎高平南瑶王雷许荣国桑鹏张博妮辛舟
Owner CHINA NORTH IND NO 205 RES INST
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