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Regeneration method of waste acid in polysilicon texturing process and waste acid regeneration system

A polysilicon and acid regeneration technology, which is applied in crystal growth, chemical instruments and methods, and after treatment, can solve the problems of acid waste and high cost, and achieve the effects of low power consumption, cost saving, and no sludge generation

Active Publication Date: 2012-04-11
BYD CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the problems of high cost and waste of acid solution in the prior art, the present invention provides a regeneration method of waste acid in the polysilicon texturing process. The recovery efficiency of waste acid is high and the cost is low. low, and the acid is reusable

Method used

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  • Regeneration method of waste acid in polysilicon texturing process and waste acid regeneration system
  • Regeneration method of waste acid in polysilicon texturing process and waste acid regeneration system
  • Regeneration method of waste acid in polysilicon texturing process and waste acid regeneration system

Examples

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Embodiment 1

[0044] This example is used to illustrate the regeneration method of waste acid in the polysilicon texturing process disclosed in the present invention.

[0045] Take 1000L of waste acid solution produced in the polysilicon texturing process, and measure the concentration of fluorine ion in it to be 5.5mol / l, the concentration of nitrate ion to be 5mol / l, and the concentration of hexafluorosilicate ion to be 0.4 mol / l, put the above waste acid solution in the waste acid storage tank.

[0046] Take 2180mol ethylenediaminetetraacetic acid and place it in the complexing agent storage tank. use figure 1 The system shown is separated. Mix the waste acid liquid in the waste acid storage tank with the ethylenediaminetetraacetic acid in the complexing agent storage tank to obtain a mixed solution, then inject the mixed solution into the first channel of the diffusion dialyzer, and inject deionized water into the diffusion dialyzer the second channel. Control the liquid flow rate i...

Embodiment 2

[0049] This example is used to illustrate the regeneration method of waste acid in the polysilicon texturing process disclosed in the present invention.

[0050] Get 1000L of waste acid solution produced in the polysilicon texturing process, measure wherein the concentration of fluorine ion is 6.48mol / l, the concentration of nitrate ion is 6.16mol / l, according to the amount of silicon atoms, the concentration of hexafluorosilicate complex ion is 0.50mol / l, put the above waste acid solution in the waste acid storage tank.

[0051] Get 500mol acetylacetone and place complexing agent storage tank. use figure 1 The system shown is separated. Mix the waste acid liquid in the waste acid storage tank with the ethylenediaminetetraacetic acid in the complexing agent storage tank to obtain a mixed solution, then inject the mixed solution into the first channel of the diffusion dialyzer, and inject deionized water into the diffusion dialyzer the second channel. Control the liquid flo...

Embodiment 3

[0054] This example is used to illustrate the regeneration method of waste acid in the polysilicon texturing process disclosed in the present invention.

[0055] Get 1000L of waste acid solution produced in the polysilicon texturing process, measure wherein the fluoride ion concentration is 6.48mol / l, the nitrate ion concentration is 6.18mol / l, according to the amount of silicon atoms, the hexafluorosilicate complex ion concentration is 0.50mol / l, put the above waste acid solution in the waste acid storage tank.

[0056] Get 1500mol 2-methyl-8-hydroxyquinoline and place it in a complexing agent storage tank. use figure 1 The system shown is separated. Mix the waste acid liquid in the waste acid storage tank with the ethylenediaminetetraacetic acid in the complexing agent storage tank to obtain a mixed solution, then inject the mixed solution into the first channel of the diffusion dialyzer, and inject deionized water into the diffusion dialyzer the second channel. Control ...

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Abstract

The invention provides a regeneration method of waste acid in a polysilicon texturing process and a waste acid regeneration system. The regeneration method of waste acid in the polysilicon texturing process comprises the following steps: mixing a waste acid liquid with a compelxing agent to obtain a mixed liquid; and then introducing the mixed liquid into a diffusion dialyzer, wherein the diffusion dialyzer comprises an ion diffusion membrane as well as a first channel and a second channel which are located at the two sides of the ion diffusion membrane, the mixed liquid is introduced into the first channel, deionized water is introduced into the second channel, the flowing directions of the mixed liquid and the deionized water are opposite, a recovery liquid flows out of the second channel, a separated liquid flows out of the first channel, and the complexing agent and silicon can form an organic compelxing agent of a complex. The method for recovering waste acid has high efficiency and low cost, and the acid liquid can be repeatedly utilized.

Description

technical field [0001] The invention relates to a waste acid regeneration method and a regeneration system, in particular to a waste acid regeneration method and a waste acid regeneration system in a polysilicon texturing process. Background technique [0002] At present, countries around the world are paying more and more attention to environmental issues, and my country has also proposed a sustainable development strategy of energy conservation and emission reduction. With the continuous improvement of people's awareness of environmental protection, the treatment of industrial "three wastes" has also become a major issue related to the survival and development of enterprises. Among them, the discharge of waste acid not only wastes a lot of available resources, but also causes serious environmental pollution problems, which affects the survival and development of enterprises. From the environmental point of view, reducing the discharge of industrial waste, classifying and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/46C23F1/24C30B33/10
Inventor 郭海峰王胜亚龚振刚姜俊刚
Owner BYD CO LTD
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