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Method for modifying surface by adopting remote plasmas

A remote plasma and surface modification technology, applied in the field of ion surface modification, can solve problems such as material performance degradation

Active Publication Date: 2013-05-22
JIANGSU HENGLI CHEM FIBER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when using these conventional plasmas to treat materials, because the plasma conditions are significantly affected by changes in electric field strength and pressure, the electron energy in the plasma has a wide distribution and contains some high-energy particles, which will cause plasma dissociation and make the material properties Deterioration occurs

Method used

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  • Method for modifying surface by adopting remote plasmas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Place the polyester FDY fiber with a circular cross-section of 73dtex / 192f in the downstream direction of the airflow 5cm away from the plasma discharge area, and pump the plasma to a vacuum of 1×10 -2 Pa, with oxygen as the carrier gas, sulfur dioxide as the modified gas, and oxygen / sulfur dioxide as a mixed gas into the plasma, the volume content of sulfur dioxide is 10%, the gas pressure is 5Pa, and the discharge power is 100W. After 5s discharge treatment, it is obtained Modified fiber; the moisture regain of the treated material is 1.1%.

Embodiment 2

[0029] Place the polyester FDY fiber with a circular cross-section of 73dtex / 192f in the downstream direction of the airflow 60cm away from the plasma discharge area, and pump the plasma to a vacuum of 5×10 -2 Pa, with oxygen as the carrier gas, sulfur dioxide as the modified gas, and oxygen / sulfur dioxide as a mixed gas into the plasma, the volume content of sulfur dioxide is 90%, the gas pressure is 100Pa, and the discharge power is 100W. After 120s discharge treatment, it is obtained Modified fiber; the moisture regain of the treated material is 4.4%.

Embodiment 3

[0031] Place the LDPE film at a place 20cm away from the plasma discharge area downstream along the airflow direction, and pump the plasma to a vacuum of 1×10 -2Pa, with oxygen as the carrier gas, hydrogen sulfide gas as the modified gas, oxygen / hydrogen sulfide as a mixed gas into the plasma, the volume content of hydrogen sulfide is 60%, the gas pressure is 50Pa, the discharge power is 70W, after 50s The modified film was obtained after discharge treatment; the contact angle of the treated material was reduced from 105° to 30°.

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Abstract

The invention relates to a method for modifying the surface of a material, in particular to a method for modifying the surface by adopting remote plasmas. In the method, a material to be treated is not directly put in a plasma discharge zone but in the lower reaches along the airflow direction, a certain distance from the plasma discharge zone. The method is characterized by firstly putting the sample to be treated in plasma equipment, vacuumizing the plasma equipment, then simultaneously introducing modified gas and carrier gas into the plasma equipment according to reasonable volume ratio, carrying out discharging under the action of the electric field to generate plasmas and carrying out a reaction on the generated plasmas on the surface of the material to be modified to achieve the modification effect. The method is characterized in that the object to be modified is put in the lower reaches along the airflow direction, a certain distance from the plasma discharge zone. The method has the following beneficial effects: being treated by the remote plasmas, the surface of the material changes obviously, but the mechanical property of the material basically keeps stable.

Description

technical field [0001] The invention relates to a material surface modification method, in particular to a remote plasma surface modification method. Background technique [0002] Plasma is the fourth state of matter, which is composed of a large number of electrons, cations, and free radicals. These microscopic particles with high activity and high energy can interact with the surface of the material, thereby endowing the material without changing the bulk properties of the material. With new properties, such as adhesion, reactivity, biocompatibility, water absorption, etc., the field of use of materials can be greatly expanded. At present, low-temperature plasma modification is commonly used in the field of material modification. Usually, under vacuum conditions, capacitive or inductive excitation is used to generate plasma to modify the surface of the material placed in the plasma discharge area. However, when using these conventional plasmas to treat materials, because ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): D06M10/06C08J7/12
Inventor 沈风雷丁建中陈国强汤方明王丽丽
Owner JIANGSU HENGLI CHEM FIBER
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