Dynamic balance method of magnetic molecular pump
A molecular pump and magnetic levitation technology, applied in pump control, non-variable capacity pump, machine/engine, etc., can solve the problems of low efficiency and cumbersome steps, and achieve the effect of simplified operation steps, easy operation, and efficient dynamic balance operation.
Active Publication Date: 2014-06-25
KYKY TECH +1
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Problems solved by technology
[0011] The technical problem to be solved by the present invention is that the steps of the dynamic balancing method of the magnetic levitation molecular pump in the prior art are cumbersome and the efficiency is very low. Therefore, it provides a method that can directly perform dynamic balancing operation on the rotor of the magnetic levitation molecular pump at high speed, with simple steps and high efficiency. High Dynamic Balancing Method of Magnetic Suspension Molecular Pump
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Embodiment Construction
[0051] Such as figure 1 As shown, it is a schematic structural diagram of the magnetic levitation molecular pump involved in the present invention. The magnetic levitation molecular pump in this embodiment is vertically arranged, and the magnetic levitation molecular pump includes a pump body 3 and a rotor shaft system arranged in the pump body 3 , and other structures that the magnetic levitation molecular pump in the prior art should have.
[0052] The rotor shaft system includes a rotor, a first radial magnetic bearing 6, a second radial magnetic bearing 9, a first axial magnetic bearing 13 and a second axial magnetic bearing 15; the rotor includes a rotor shaft 7, and the The impeller 1 fixed by the rotor shaft 7, and the assembly parts used to fix the impeller 1, such as screws, nuts, etc.
[0053] The axis of the rotor shaft 7 is arranged along the vertical direction, and the impeller 1 is fixedly arranged on the upper part of the rotor shaft 7 . The lower part of the ...
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The invention relates to a dynamic balance method of a magnetic molecular pump. After a motor of the magnetic molecular pump is started, a force control imbalance vibrating control module is started. If an imbalance mass on a rotor enables the maximum radial amplitude of the rotor not to exceed one half of the protective gap in the accelerating process under the control of the force control imbalance vibrating control module, the imbalance vibrating control module can limit the common-frequency vibrating of the rotor, the rotating speed of the rotor can quickly exceed the rigid critical rotating speed, so that the dynamic balance operation can be carried out on the rotor of the magnetic molecular pump at high speed. The dynamic balance method can directly carry out dynamic balance operation to the rotor of the magnetic molecular pump at high speed and has simple steps and high efficiency.
Description
technical field [0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a method for dynamic balancing of a magnetic levitation molecular pump. Background technique [0002] Molecular pump is a kind of vacuum pump, which uses high-speed rotating rotor impeller to transfer momentum to gas molecules to obtain directional speed, so that the gas is compressed and driven to the exhaust port, and then pumped away by the backing pump . The magnetic levitation molecular pump is a molecular pump that uses magnetic bearings (also known as active magnetic levitation bearings) as the molecular pump rotor support. Contact has the advantages of no mechanical wear, low energy consumption, high allowable speed, low noise, long life, and no need for lubrication. At present, magnetic levitation molecular pumps are widely used in the fields of obtaining high vacuum and high cleanliness vacuum environments. [0003] The internal structure of the mag...
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IPC IPC(8): F04D27/00
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH