Micro tensile measurement unit and production method thereof

Abstract

The invention discloses a micro tensile measurement unit and a production method thereof. The measurement unit comprises a fixed platform and a moving platform which are cooperated with each other, wherein, one end of the fixed platform is fixed connected with a first sample platform, one end of the moving platform is connected with a second sample platform through an elastic element, when measuring, two ends of a sample is respectively connected with the first sample platform and the second sample platform, and the second sample platform is provided with a second centring mark and a displacement mark which are cooperated with a first centring mark of the first sample platform. The production method comprises the following steps: taking a stainless steel substrate, carrying out photoetching and graphic processing on the stainless steel substrate, and then carrying out high temperature high temperature baking and electrochemical etching to obtain a target product. According to the invention, the measurement unit has simple and firm structure and is not easy to damage; the method is simple and easy to operate; the problems of thick rubber process and microstructure planarization technology required by present micro-electroforming technology are overcome, the problem of performance degradation of the mechanical sensor caused by micro-electroforming defects is prevented, the aligning precision of the device is increased, and simultaneously the production cost is reduced.

Description

technical field [0001] The invention particularly relates to a micro-tensile measuring component used in the technical field of film mechanical performance testing and a manufacturing method thereof, belonging to the field of micro-mechanical manufacturing. Background technique [0002] With the rapid development of MEMS technology, various thin film materials are widely used in various micro-nano devices. However, due to the influence of the size effect, when the device is small to the micro-nano scale, the mechanical properties of the material are significantly different from those of the bulk material, and different preparation methods may cause different organizational structures, resulting in significant differences in material properties. When designing MEMS / NEMS devices and conducting reliability analysis, it is urgent to know the mechanical performance parameters of the materials used, such as elastic modulus and fracture strength. At present, the mechanical perform...

AI Technical Summary

Problems solved by technology

Although the mechanical sensor produced by this production method can meet the high-precision measurement problem, the production process needs

Images