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Internal and external truss type three-frame micro-mechanical gyro structure

A micro-mechanical gyro and three-frame technology, applied in the direction of gyro effect for speed measurement, gyro/steering sensing equipment, measuring devices, etc., to achieve the effect of minimizing mass, reducing coupling error, and improving gyro sensitivity

Active Publication Date: 2014-03-19
FLIGHT AUTOMATIC CONTROL RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Even if the fully decoupled structure of the three frames is used, due to the asymmetry of the processing technology, it may still cause an orthogonal coupling error to mask the situation of the Coriolis force detection input signal

Method used

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  • Internal and external truss type three-frame micro-mechanical gyro structure
  • Internal and external truss type three-frame micro-mechanical gyro structure
  • Internal and external truss type three-frame micro-mechanical gyro structure

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Embodiment Construction

[0017] Such as figure 1 As shown in 2, the present invention includes: the outer frame is the driving part of the gyroscope structure, and the outer frame is connected as a complete whole by the drive units 1 separated on both sides of the structure through the outer frame truss beam 9. The driving force on the outer frame is applied by electrodes 5a and 5b and the variable-area comb-teeth electrodes formed by corresponding comb teeth on the driving unit 1 . The electrodes 5a, 5b and the corresponding comb teeth are driving electrodes. Electrodes 6a, 6b, 6c, 6d are drive feedback electrodes, wherein 6a, 6b are connected in parallel, 6c, 6d are connected in parallel to increase the feedback capacitance value, and the left and right electrodes form differential capacitance. The outer frame is connected to fixed anchor points through elastic beams 8a, 8b, 8c, 8d, and the fixed anchor points are 7a, 7b, 7c, and 7d.

[0018] The middle frame 2 is a Coriolis mass frame, and the mi...

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Abstract

The invention belongs to a micro-mechanical gyro structure technology field, and relates to an internal and external truss type three-frame micro-mechanical gyro structure. The structure comprises an external frame, an internal frame and a medium frame, wherein the external frame comprises two separation blocks and two groups of trussed girders. Each group of trussed girder comprises two folding beams and a truss, and the external side of each separation block has a comb electrode. Two ends of each trussed girder are connected with one folding beam respectively, the two groups of trussed girders are connected by the separation blocks, and then the external frame is formed. The external frame is fixed on the anchor points at the outer end of the structure by four folding beams, and the left and the right parts of the external frame are connected to form a complete frame by the truss. The two ends of the medium frame are separate type double-folding beams, and the external frame and the medium frame are connected by the separate type double-folding beams. The medium frame and the internal frame are connected by the truss type double-folding beams, a comb electrode is arranged in the internal frame, and the internal frame is connected to the internal anchor points of the gyro structure by four separate type double-folding beams. The structure of the invention reduces the quantity of useless mass blocks, and raises gyro susceptibility. The special hexagon pore structure minimizes the structural strength loss, and the shape of the step type comb electrode enhances the gyro stability.

Description

technical field [0001] The invention belongs to the technical field of micromechanical gyroscope structures, and relates to an inner and outer truss type three-frame micromechanical gyroscope structure. technical background [0002] The medium and high-precision micro-mechanical gyroscope has been widely used in the field of inertial navigation and guidance in the world. Among them, the micromachined gyroscope for guidance is required to have the characteristics of large range and high impact resistance. This type of micromechanical gyroscope includes comb-tooth line vibration type, comb-tooth line vibration ring type, etc. Among them, the comb-tooth line vibration capacitive type is becoming a mainstream structure. [0003] The core of the comb-tooth line vibration capacitive gyroscope is a mass block vibrating in the plane. The core principle is to use the electrostatic driving force to make the mass block vibrate in the X direction in the plane. Under the action of the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5733G01C19/5769
Inventor 余才佳王刚熊恒
Owner FLIGHT AUTOMATIC CONTROL RES INST
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