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Internal and external truss type three-frame micro-mechanical gyro structure

A micromachined gyroscope and three-frame technology, which is applied in the direction of speed measurement, gyroscope/steering sensing equipment, measuring device, etc. with the gyro effect, to improve the sensitivity of the gyro, minimize the coupling error, and reduce the coupling error.

Active Publication Date: 2012-05-02
FLIGHT AUTOMATIC CONTROL RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Even if the fully decoupled structure of the three frames is used, due to the asymmetry of the processing technology, it may still cause an orthogonal coupling error to mask the situation of the Coriolis force detection input signal

Method used

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  • Internal and external truss type three-frame micro-mechanical gyro structure
  • Internal and external truss type three-frame micro-mechanical gyro structure
  • Internal and external truss type three-frame micro-mechanical gyro structure

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Embodiment Construction

[0017] Such as figure 1 , As shown in 2, the present invention includes: the outer frame is the driving part of the gyro structure, and the outer frame is connected as a complete whole by the driving units 1 separated on both sides of the structure through the outer frame truss beam 9. The driving force on the outer frame is exerted by the 5a and 5b electrodes and the variable area comb-teeth electrodes formed by the corresponding comb-teeth on the driving unit 1. The electrodes 5a, 5b and the corresponding comb teeth are driving electrodes. The electrodes 6a, 6b, 6c, and 6d are driving feedback electrodes. Among them, 6a, 6b are connected in parallel, and the parallel connection of 6c and 6d has increased the feedback capacitance value, and the left and right electrodes form a differential capacitance. The outer frame is connected to fixed anchor points by elastic beams 8a, 8b, 8c, 8d, and the fixed anchor points are 7a, 7b, 7c, and 7d.

[0018] The middle frame 2 is a Coriolis...

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Abstract

The invention belongs to a micro-mechanical gyro structure technology field, and relates to an internal and external truss type three-frame micro-mechanical gyro structure. The structure comprises an external frame, an internal frame and a medium frame, wherein the external frame comprises two separation blocks and two groups of trussed girders. Each group of trussed girder comprises two folding beams and a truss, and the external side of each separation block has a comb electrode. Two ends of each trussed girder are connected with one folding beam respectively, the two groups of trussed girders are connected by the separation blocks, and then the external frame is formed. The external frame is fixed on the anchor points at the outer end of the structure by four folding beams, and the left and the right parts of the external frame are connected to form a complete frame by the truss. The two ends of the medium frame are separate type double-folding beams, and the external frame and the medium frame are connected by the separate type double-folding beams. The medium frame and the internal frame are connected by the truss type double-folding beams, a comb electrode is arranged in the internal frame, and the internal frame is connected to the internal anchor points of the gyro structure by four separate type double-folding beams. The structure of the invention reduces the quantity of useless mass blocks, and raises gyro susceptibility. The special hexagon pore structure minimizes the structural strength loss, and the shape of the step type comb electrode enhances the gyro stability.

Description

Technical field [0001] The invention belongs to the technical field of micromechanical gyroscope structures, and relates to an inner and outer truss type three-frame micromechanical gyroscope structure. technical background [0002] Medium and high-precision micromechanical gyroscopes have been widely used in the field of inertial navigation and guidance in the world. Among them, the micromechanical gyroscope for guidance is required to have the characteristics of large range and high impact resistance. This type of micromechanical gyroscope includes comb-tooth line vibration type, comb-tooth vibration ring type, etc. Among them, comb-tooth line vibration capacitor type is becoming a mainstream structure. [0003] The core of the comb-tooth line vibrating capacitive gyroscope structure is a mass that vibrates in the plane. The core principle is to make the mass vibrate in the X direction in the plane through electrostatic driving force. When the angular velocity input in the Z axi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5733G01C19/5769
Inventor 余才佳王刚熊恒
Owner FLIGHT AUTOMATIC CONTROL RES INST
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