Three-dimensional micro nanometer contact scanning probe

Abstract

The invention discloses a three-dimensional micro nanometer contact scanning probe, which is characterized in that in the front section of a cylinder, a Michelson interferometer is fixedly arranged in an installation box; in a rear section of the cylinder, a two-dimensional sensor is fixedly installed on an installation plate; a fixing ring is arranged at the front end of the front section of thecylinder, a cross suspension sheet is arranged in the center of the fixing ring, each cantilever of the cross suspension sheet is connected with the fixing ring through each cantilever spring sheet to form a suspension structure, a central planar reflection mirror and at least one cantilever planar reflection mirror are respectively positioned on the cross suspension sheet, emergent light of the Michelson interferometer is projected on the central planar reflection mirror, emergent light of the two-dimensional sensor is projected on the cantilever planar reflection mirror, and on one side plane of the cross suspension sheet towards the outside of the cylinder, the scanning probe is fixedly installed in the center of the cross suspension sheet. The three-line structured light machine vision width measurement method can acquire detection effects with large range, high accuracy, high flexibility and small measurement force.

Description

technical field [0001] The invention relates to the field of micro-nano measurement, and more specifically relates to a high-precision and large-range three-dimensional micro-nano contact scanning probe used in a nano-coordinate measuring machine. Background technique [0002] With the development of micro-nano processing technology, micro-devices with sizes between millimeters and microns have come out one after another, such as micro-lenses, micro-gears, micro-chips, fuel injectors, etc.; the shape of micro-devices is becoming more and more complex, and the allowable dimensional tolerance Therefore, there is an urgent need for a three-coordinate measuring machine with nanometer-level measurement accuracy in practice. [0003] The nano three-dimensional coordinate measuring machine is mainly composed of two parts: a three-dimensional motion platform with nano-positioning measurement function and a probe with sensing function. There are two types of probes: contact type and...

AI Technical Summary

Problems solved by technology

When the end of the measuring rod is subjected to external force, the silicon membrane is deformed, and the displacement and force of the end of the measuring head are detected through the change of piezoresistance on the silicon membrane. The probe adopts 24 piezoresistive detection methods to improve Improve the detection sensitivity and reduce the influence of the probe on the temperature, but the thin film structure makes the stress distribution uneven, and the silicon film structure is relatively easy to break

The strain gauge-based three-dimensional micro-contact sensor head developed by the University of Eindhoven in the Netherlands. The strain gauge, the circuit and the elastic element are made into a whole through precipitation, plate making, etching and other processes. The force and displacement of the probe in all directions The change of the strain gauge is detected by the strain gauge installed on the sensitive beam. The volume is small, but the detection sensitivity and accuracy of the strain gauge are relatively low, and the probe adopts a triangular topology, which makes the decoupling complicated.

The Swiss Federal Bureau of Metrology and Testing (METAS) has developed an electromagnetic micro-contact probe. The probe has degrees of freedom in three directions. The detection in each direction is realized by inductance. The force in the three directions is the same, and the structure is mainly Made of aluminum, the electromagnetic probe has a high measurement range, high lateral pick-up sensitivity and low contact force, but its structure is very complicated, difficult to install and adjust, and it adopts a triangular suspension structure, which makes decoupling very troublesome

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