The invention discloses a three-dimensional micro nanometer contact scanning probe, which is characterized in that in the front section of a cylinder, a
Michelson interferometer is fixedly arranged in an installation box; in a rear section of the cylinder, a two-dimensional sensor is fixedly installed on an installation plate; a fixing ring is arranged at the front end of the front section of thecylinder, a cross suspension sheet is arranged in the center of the fixing ring, each
cantilever of the cross suspension sheet is connected with the fixing ring through each
cantilever spring sheet to form a suspension structure, a central planar reflection mirror and at least one
cantilever planar reflection mirror are respectively positioned on the cross suspension sheet, emergent light of the
Michelson interferometer is projected on the central planar reflection mirror, emergent light of the two-dimensional sensor is projected on the cantilever planar reflection mirror, and on one side plane of the cross suspension sheet towards the outside of the cylinder, the scanning probe is fixedly installed in the center of the cross suspension sheet. The three-line
structured light machine vision width measurement method can acquire detection effects with
large range, high accuracy, high flexibility and small measurement force.