Method for measuring quantum efficiency and responsivity parameter of charge coupled device (CCD) chip

A technology of quantum efficiency and responsivity, applied in the field of measurement, which can solve the problems of continuous laser change, quantum efficiency gap, and inability to reflect the quantum efficiency and responsivity parameters of CCD chips.

Inactive Publication Date: 2012-06-20
XIDIAN UNIV
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Problems solved by technology

[0003] Traditional measurement methods of quantum efficiency and responsivity parameters of CCD chips generally use lasers as monochromatic light sources. The quantum efficiency in the wavelength range can only be derived from the quantum efficiency of other wavelengths, resulting in a relatively large gap between the measured quantum efficiency and the actual value, which cannot reflect the actual quantum efficiency and responsivity parameters of the CCD chip

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  • Method for measuring quantum efficiency and responsivity parameter of charge coupled device (CCD) chip
  • Method for measuring quantum efficiency and responsivity parameter of charge coupled device (CCD) chip
  • Method for measuring quantum efficiency and responsivity parameter of charge coupled device (CCD) chip

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[0037] CCD chip is a widely used imaging device, which is widely used in many fields such as astronomy, aerospace, biological and medical research, molecular dynamics, spectroscopy, underwater photography, X-ray detection, etc. For this reason, the performance parameters of CCD chip It is critical to conduct an assessment. At present, the evaluation of CCD chips mainly includes the following parameters:

[0038] ①Quantum efficiency η: The ratio of the number of photoelectrons generated by the CCD under the irradiation of wavelength λ to the number of incident photons. This parameter characterizes the response capability of the CCD chip to monochromatic light of a specific wavelength.

[0039] ②Responsivity parameter R: The ratio of the signal voltage to the exposure amount of the CCD under the illumination of monochromatic light of a given wavelength. This parameter generally describes the CCD quantum efficiency and system gain.

[0040] ③Saturation μ p.sat : The number of ...

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Abstract

The invention discloses a method for measuring quantum efficiency and a responsivity parameter of a charge coupled device (CCD) chip, and mainly solves the problem of low measurement precision in the prior art. The method comprises the following steps of: selecting a series of wavelengths at equal intervals, setting a tunable wavelength monochromatic uniform light source system by using the wavelength values respectively, generating monochromatic light with the corresponding wavelengths, shooting image information according to requirements, uploading to a computer, selecting needed images by using matched computer software, calculating the mean gray value mu and the image variance sigma<2> of the images, calculating a gain K of a control circuit respectively according to the calculated values, and calculating the quantum efficiency eta and the responsivity R according to the mean gray value mu, the image variance sigma<2> and the gain K. The method for measuring the quantum efficiency and the responsivity parameter of the CCD chip has the advantages of high precision and high stability in parameter measurement and is suitable for the precise measurement of the quantum efficiency and the responsivity parameter of the CCD chip.

Description

technical field [0001] The invention belongs to the field of measurement technology, in particular to the measurement of CCD chip quantum efficiency and responsivity parameters, which is used for the development, evaluation and screening of CCD chips. Background technique [0002] In the development and application of CCD chips, due to the limitations of processing and measurement technology, the actual quantum efficiency and responsivity parameters of CCD chips are different from the measured values ​​given by the manufacturer. In some key application fields, quantitative understanding is required. The actual performance parameters of the CCD chip, so as to make reasonable corrections to the collected data and obtain better and more accurate data. Therefore, it is necessary to propose a method to effectively measure the quantum efficiency and responsivity parameters of the CCD chip, and process the CCD output data through these performance parameters to obtain more realisti...

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Application Information

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IPC IPC(8): G01R31/26G01M11/02
Inventor 邵晓鹏吕斐陈朝康王杨许宏涛乔林杨晓晖徐大庸马菁汀
Owner XIDIAN UNIV
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