Three-dimensional position tracking and measuring device and measuring method thereof

Abstract

The invention belongs to the field of measurement and in particular provides a three-dimensional position tracking and measuring device and a measuring method thereof. The device comprises an interferometer body, an interferometer mirror group, a deviation detection system, a two-dimensional follow-up system, a target reflecting mirror, a first turning component and a second turning component. The method is characterized in that the laser path emitted by the interferometer body passes through the interferometer mirror group and a light splitting component in sequence and irradiates the target reflecting mirror after being turned by the first and the second turning components, the light reflected by the target reflecting mirror irradiates the deviation detection system after being turned by the two turning components, the light is split into two paths by the light splitting component, and one path of light is reflected back to the interferometer body and the other path of light irradiates a facula position sensor; and the facula position sensor converts the detected offset to a displacement signal and then transmits the displacement signal to each servo motor in the two-dimensional follow-up system and the servo motors drive the first and the second turning components to move to accurately track the target reflecting mirror. The device has the advantages of high measurement accuracy, simple structure and good portability and the measuring method is simple and has strong reliability.

Description

technical field [0001] The invention belongs to the field of measurement, in particular to a three-dimensional position tracking measurement device and a measurement method thereof. Background technique [0002] Precision position and attitude measurement systems are widely used, such as workpiece processing, component assembly, tool movement, tool positioning, etc. In some workstation-level production fields, product quality mainly depends on the positional accuracy of equipment or workpieces. For example, spot welding operations based on joint robots usually only need to ensure the position accuracy of the robot's execution end under the corresponding load. For this type of workstation-level measurement requirements, the measurement equipment needs to have the following characteristics: 1. Good portability of the measurement equipment; 2. The body of the measurement equipment and the test method have no effect on the accuracy of the measured equipment; 3. The measurement ...

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Problems solved by technology

[0003] Among the existing related products, the gantry-type three-coordinate measuring machine has high measurement accuracy, but it is too bulky to be moved; the articulated arm-type measuring instrument is portable, but the accuracy is >30 μm at 1m, and generally requires personnel assistance, so it is not suitable for autonomous tracking Measurement: The laser tracker has good portability, and its accuracy is about 15 μm at a distance of 1m. Its measurement accuracy is affected by the accuracy of the code disc, and becomes larger with the increase of the measurement distance

Therefore, existing equipment is not yet capable of meeting the above workstation-level position measurement requirements

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