Slight abrasion measurement method based on shelter processing technology

Abstract

The invention discloses a slight abrasion measurement method based on shelter processing technology, which comprises placing a large sample and a small sample in a vacuum processing chamber, sheltering the partial surface of the large sample by placing the small sample on the surface of the large sample, performing surface treatment on the large sample and the small sample, forming a processed area and an unprocessed area on the surface of the large sample, and then removing the small sample; taking the large sample and the small sample out of the vacuum processing chamber, and using a pin plate abrading machine or a reciprocating abrading machine to abrade the unprocessed area and the processed area which are formed on the large sample to form abraded marks; and adopting an interference microscope to measure, and sending the measurement data to a digital camera or a computer. The slight abrasion measurement method can reduce effects of volatility of pretreatment conditions and vacuum processing conditions, can improve processing efficiency on the vacuum surfaces of materials, improve repeatability of processing technology and quickens practical process of processing technology.

Description

technical field [0001] The invention relates to a light wear measurement method based on masking treatment technology, which is mainly used in the masking technology of samples or parts that need to be subjected to various heat treatments or high-energy beam treatments in vacuum. Background technique [0002] The evaluation of the vacuum surface treatment effect of precision parts has always been an unresolved problem. In order to perform vacuum surface treatment (ion beam, electron beam, laser beam treatment, etc.) A large amount of energy and time will affect the processing efficiency, and the fluctuation of the pretreatment conditions and vacuum treatment conditions of the same batch of samples that need to be tested for different performances will affect the repeatability of the treatment effect, often leading to specious and contradictory results. The process of practical application of processing technology. In order to improve the processing efficiency and ensure th...

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Problems solved by technology

[0003] In the past, people mainly used "weighing method" and step meter to measure surface wear, but "weighing method" has two obvious shortcomings: first, this measurement method is not intuitive enough to reflect the depth information of wear scars, and the depth Information is very important when studying the wear mechanism; second, due to the small amount of wear of precision parts, the precision of the results measured by the "weighing method" is not high; Jumps will occur and the depth information will be distorted

Since there are wear marks on the sample, the optical path of light reflected from the sample and from the surface of the substrate varies with the shape and depth of the wear marks, resulting in corresponding bending of the interference fringes of the same order, according to the bending of the fringes The maximum depth and cross-sectional area of ​​the wear scar can be measured, but what method to choose to calculate the cross-sectional area is still a question to be explored

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