The invention discloses a
wafer chamfering method which comprises the following steps: determining an edge defect of a
wafer to be chamfered, and obtaining the
maximum depth h of the edge defect in the radial direction of the
wafer to be chamfered; establishing a coordinate
system which takes the preset positioning notch on the wafer to be chamfered facing the preset direction as a reference position, taking the preset direction as a Y axis, taking a direction perpendicular to the preset direction as an X axis, and obtaining an included angle theta between the
maximum depth direction of the edge defect and the Y axis; respectively acquiring a first component of the
maximum depth h in the X-axis direction and a second component of the maximum depth h in the Y-axis direction according to the included angle theta; according to the first component and the second component, the relative position of the to-be-chamfered wafer and the
machining carrying table is adjusted, so that the circle center of the to-be-chamfered wafer deviates towards the edge defect relative to the rotating center of the
machining carrying table; and the to-be-chamfered wafer is ground through the
grinding wheel mechanism, the removal amount of the side, close to the edge defect, of the to-be-chamfered wafer is larger than the removal amount of the side, away from the edge defect, of the to-be-chamfered wafer, and the chamfered wafer is obtained.