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Manufacturing method of micro-lens structure, and image display system containing micro-lens structure

A technology of image display system and manufacturing method, applied in the direction of lens, semiconductor/solid-state device manufacturing, instrument, etc., which can solve the problems of increasing the difficulty of the manufacturing process, the time required for the manufacturing process, the complexity of the manufacturing method, and the increase in the cost of the manufacturing process, etc.

Active Publication Date: 2015-03-25
INNOCOM TECH (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the current fabrication methods of traditional microlenses are very complicated (such as the microlens fabrication process described in U.S. Patent Publication No. 6,271,900), requiring the use of many different fabrication process steps (for example: deposition, spin coating, baking, developing , Exposure and Etching), and needs to be converted in different manufacturing process equipment (including expensive lithography equipment), so in addition to greatly increasing the difficulty of the manufacturing process and the time required for the manufacturing process, it also greatly increases the cost of the manufacturing process

Method used

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  • Manufacturing method of micro-lens structure, and image display system containing micro-lens structure
  • Manufacturing method of micro-lens structure, and image display system containing micro-lens structure
  • Manufacturing method of micro-lens structure, and image display system containing micro-lens structure

Examples

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Embodiment 1

[0035] Microlens structure with multiple protrusions

[0036] A glass substrate is cleaned by ultrasonic vibration using neutral detergent, acetone, and ethanol. The substrate is blown dry with nitrogen gas, and the substrate is transported into a manufacturing process chamber of a chemical vapor deposition device. After vacuuming, the first production process gas SiH is introduced 4 and N 2 O, whose flow rates are 100sccm and 500sccm, respectively, and the chemical vapor deposition process is carried out to form multiple SiO 2 protruding, please refer to Figure 5 , is the SEM image of the microlens structure. Among them, the power of the chemical vapor deposition process is 0.7kW, and the deposition rate is 175nm / min.

Embodiment 2

[0038] Microlens structure with composite structure

[0039] A glass substrate is cleaned by ultrasonic vibration using neutral detergent, acetone, and ethanol. The substrate is blown dry with nitrogen gas, and the substrate is transported into a manufacturing process chamber of a chemical vapor deposition device. After vacuuming, carry out the chemical vapor deposition manufacturing process according to the manufacturing process conditions of Example 1, to form a plurality of SiO 2 protrusion. After completing the manufacturing process of the protrusion, pass a second manufacturing process gas SiH 4 , NH 3 and N 2 , each gas flow rate is 230sccm, 150sccm and 3800sccm respectively, to carry out the chemical vapor deposition manufacturing process, forming a first transparent material layer (material is SiN x ), covering the protrusion. After completing the manufacturing process of the first transparent material layer, pass a third manufacturing process gas SiH 4 , N 2...

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Abstract

The invention discloses a manufacturing method of a micro-lens structure, and an image display system containing the micro-lens structure. The manufacturing method of the micro-lens structure comprises the step of: forming a plurality of discontinuous bulges on a base plate by a chemical vapor deposition method, wherein the power range used by the chemical vapor deposition method is within the range of 0.5-6kw, and the rate of deposition is within the range of 1-200A / s.

Description

technical field [0001] The invention relates to an image display system and a manufacturing method thereof, in particular to an image display system with a microlens structure and a manufacturing method thereof. Background technique [0002] In recent years, with the advancement of electronic product development technology and its increasingly wide application, such as the advent of mobile phones, PDAs and notebook computers, the development of flat-panel displays with smaller volume and power consumption characteristics compared with traditional displays The demand is increasing day by day, becoming one of the most important electronic application products at present. Among the flat-panel displays, organic electro-luminescence devices (organic electro-luminescence devices) will undoubtedly become the next The best choice for generations of flat panel displays. [0003] Generally speaking, the waveguide phenomenon caused by the total reflection of the interface of the orga...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/56H01L27/32H01L51/52G02B3/00
Inventor 陈英杰西川龙司
Owner INNOCOM TECH (SHENZHEN) CO LTD