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Conveying manipulator and handling device

A technology of manipulators and carrying arms, which is applied in the direction of manipulators, transportation and packaging, and conveyor objects. It can solve the problems of unsatisfactory heat protection, low precision requirements, and heavy handling manipulators, so as to improve batch processing capacity. , less affected by heat, and enhance the effect of heat protection

Active Publication Date: 2012-07-11
理想万里晖真空装备(泰兴)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the above-mentioned solution is mainly used to solve the wafer transmission in the field of semiconductor manufacturing where the area and weight are relatively small and the accuracy of the transmission is not very high. If it is suitable for the transmission of large-area substrates in the field of thin-film solar cell preparation, then There are the following problems: the heat reflection plate is mostly made of stainless steel, so the heat protection effect is not ideal; the thickness of the heat reflection plate is relatively thick, which makes the handling manipulator heavy and bulky, and the handling cost is also significantly increased

Method used

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  • Conveying manipulator and handling device
  • Conveying manipulator and handling device
  • Conveying manipulator and handling device

Examples

Experimental program
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Effect test

Embodiment 1

[0052]This embodiment provides a handling device, such as figure 2 As shown, the manufacturing equipment of the thin film solar cell includes: a substrate loading platform 11, a substrate unloading platform 12, a processing chamber 13, a vacuum transfer chamber 14 and a handling device, wherein: the handling device is arranged in the vacuum transfer chamber 14 is used for transferring the substrate from the substrate loading table 11 to the processing chamber 13 , and then transferring the processed substrate from the processing chamber 13 to the substrate unloading table 12 . Described handling device comprises: turntable 15, slide rail 16 and handling manipulator, wherein said slide rail 16 is positioned on described turntable 15, and described handling manipulator is positioned on described slide rail 16, and described handling manipulator moves along described slide rail 16 to slide to perform the moving action, and the turntable 5 is used to rotate the handling manipulat...

Embodiment 2

[0064] The handling manipulator in this embodiment includes: a carrying arm and a heat-resistant casing located on the surface of the carrying arm.

[0065] The carrying arm of this embodiment is a single layer, and can carry one substrate at a time.

[0066] The material of the carrying arm in this embodiment is a polymer material, and the hardness of the material becomes worse as the temperature increases. Therefore, in this embodiment, a heat-proof casing is provided on the surface of the carrying arm, and the material of the heat-proof casing is aluminum foil, which can reflect heat energy, thereby preventing the carrying arm from heating up.

[0067] The thickness range of the heat-proof casing is 0.001mm-0.3mm, preferably, the thickness range of the heat-proof casing is 0.007mm-0.1mm. The thickness of the heat-proof shell in this embodiment is specifically 0.001mm, 0.004mm, 0.007mm, 0.0085mm, 0.0095mm, 0.1mm, 0.018mm, 0.022mm, 0.026mm or 0.3mm. Compared with the stainl...

Embodiment 3

[0075] The handling manipulator in this embodiment includes: a carrying arm and a heat-resistant casing located on the surface of the carrying arm.

[0076] The carrying arms in this embodiment are arranged in a fork shape, specifically ten layers, and when carrying the substrates, one substrate can be placed on each layer, thereby improving the efficiency of transportation.

[0077]The thickness range of the heat-proof casing is 0.001mm-0.3mm, preferably, the thickness range of the heat-proof casing is 0.007mm-0.1mm. The thickness of the heat-proof shell in this embodiment is specifically 0.001mm, 0.0025mm, 0.007mm, 0.008mm, 0.009mm, 0.1mm, 0.016mm, 0.020mm, 0.026mm or 0.3mm. Compared with the stainless steel heat-proof plate in the prior art, the thickness of the heat-proof shell in this embodiment is very thin, and the volume of the handling manipulator is reduced; the density of the aluminum foil is 2.702g / cm 3 , the density of stainless steel is about 7.85g / cm 3 , so th...

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Abstract

The invention relates to a conveying manipulator and a handling device used for carrying a large area baseplate. The conveying manipulator comprises a load-bearing arm and a heat protection shell positioned on the surface of the load-bearing arm, wherein the thickness range of the heat protection shell is 0.001mm-0.3mm; and preferably, the surface of the load-bearing arm or a surface at which the heat protection shell is contacted with the load-bearing arm is provided with one or more protruding parts. The invention also provides the handling device which comprises the conveying manipulator. The conveying manipulator provided by the invention adopts the heat protection shell, the conveying manipulator still can exactly operate under a hot environment, even if the conveying manipulator is positioned in the hot environment for a long time, and the conveying manipulator can not transform; and in addition, the thickness of the heat protection shell is 0.001mm-0.3mm, further the weight of the conveying manipulator is reduced, the volume of the conveying manipulator is reduced, and the conveying cost is reduced.

Description

technical field [0001] The invention relates to a mechanical conveying device, in particular to a conveying manipulator and a conveying device for conveying large-area substrates. Background technique [0002] In the field of preparation of thin-film solar cells, the substrate needs to be transported by a handling robot, and the area of ​​the substrate is more than 0.7 square meters, and the material of the substrate is mostly glass. figure 1 A conventional manufacturing equipment for thin film solar cells is shown. Such as figure 1 As shown, the manufacturing equipment of the thin film solar cell includes: a substrate loading platform 1, a substrate unloading platform 2, a processing chamber 3, a vacuum transfer chamber 4 and a handling device, wherein: the handling device is arranged in the vacuum transfer chamber 4 is used to transfer the substrate from the substrate loading table 1 to the processing chamber 3, and then transfer the processed substrate from the processi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J19/00B25J15/00H01L31/18H01L21/677
CPCY02P70/50
Inventor 胡兵吴红星
Owner 理想万里晖真空装备(泰兴)有限公司
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