Automatic testing device and testing method for laser damage threshold value

Abstract

The invention discloses an automatic testing device and an automatic testing method for a laser damage threshold value. The automatic testing device comprises a laser, a light splitting attenuation system, a focusing system, an energy acquisition system, a beam acquisition system and a processing system, wherein the light splitting attenuation system comprises a high reflective mirror, a high transmitting mirror, a linkage mechanism and a splay compensation high transmitting mirror; and the high reflective mirror and the high transmitting mirror are transposed under the action of the linkage mechanism, and in the transposition process, the front mirror surfaces of the high reflective mirror and the high transmitting mirror are positioned on the same plane. The testing method comprises the following steps of: a) calculating damage energy on the unit area of a laser beam; b) dotting a lens to be tested to form a plurality of test dots by using the laser beam, and observing the damage condition of the surface of the lens to be tested by using the beam acquisition system; and c) regulating the energy of the laser beam, and repeating the steps a and b until the damage threshold value is measured. The structure and the testing method provided by the invention are low in test errors and high in applicability and accuracy.

Description

Technical field [0001] The invention relates to a technology for testing laser damage threshold of a lens (including a coating layer) used in a laser optical path, in particular to an automatic laser damage threshold testing device and a testing method. Background technique [0002] In high-power and high-energy laser systems, there are a large number of thin-film elements, and the ability of these elements to resist laser damage is closely related to the normal and effective operation of the system. Studies have shown that the damage of thin film elements under strong laser light is completely determined by the laser resistance of the element surface. Therefore, with the continuous expansion of the application range of high-power lasers, the importance of film resistance to laser damage has become increasingly prominent, so that the laser damage threshold has become an indispensable performance index for optical film components. The film must have a high laser damage threshold ...

AI Technical Summary

Problems solved by technology

[0004] However, due to the diversity of laser wavelengths, energies, and pulse widths, there is no multi-purpose general-purpose commercial laser threshold testing device on the market so far.

Everyone is based on the actual needs of their own companies or laboratories, temporarily builds a test platform, and conducts tests with reference to existing standard tests, resulting in uneven test indicators, complex debugging during testing, and great uncertainty in the final test data.

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