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Thin film bulk acoustic resonance biochemical sensor with annular electrodes

A thin-film bulk acoustic wave and biochemical sensor technology, which is applied in the field of biochemical sensors to achieve the effect of improving sensitivity

Inactive Publication Date: 2012-08-01
SHANDONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this solution still does not avoid the coexistence of longitudinal wave modes in the piezoelectric film.

Method used

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  • Thin film bulk acoustic resonance biochemical sensor with annular electrodes
  • Thin film bulk acoustic resonance biochemical sensor with annular electrodes
  • Thin film bulk acoustic resonance biochemical sensor with annular electrodes

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] This embodiment is a biochemical sensor for detecting the viscosity of liquid, and its device structure is as follows figure 1 and figure 2 shown.

[0026] The diameter of the inner solid circle 1A of the upper electrode is 1 / 2 of the inner diameter of the outer hollow ring 1B.

[0027] The width of the lower electrode hollow ring 2 is 1.5 times the width of the upper electrode outer hollow ring 1B.

[0028] The piezoelectric film 3 is made of aluminum nitride with a thickness of 1.5 microns, the material of the upper electrode 1 is molybdenum with a thickness of 0.1 microns, and the material of the lower electrode 2 is aluminum with a thickness of 0.1 microns.

[0029] In a specific implementation, the frequency characteristic of the S11 parameter of the device is firstly tested in an air environment. Such as image 3 As shown, the sensor only has a resonance state with a frequency of about 2 GHz in the air, which is estimated based on the thickness of the aluminu...

Embodiment 2

[0034] This embodiment is a biochemical sensor for detecting biological samples, and its device structure is as follows: figure 1 and figure 2 shown.

[0035] The diameter of the inner solid circle 1A of the upper electrode is one-third of the inner diameter of the outer hollow ring 1B.

[0036] The width of the lower electrode hollow ring 2 is 1.4 times the width of the upper electrode outer hollow ring 1B.

[0037] The piezoelectric film 3 is made of aluminum nitride with a thickness of 1 micron, and the material of the upper electrode 1 and the lower electrode 2 is gold with a thickness of 0.1 micron.

[0038] In a specific implementation, in order to detect biological substances, a biologically sensitive layer 6 needs to be coated on the surface of the thin-film BAR biochemical sensor. For the present invention, if figure 2 As shown, the biologically sensitive layer 5 should be located in the area between the inner solid circle 1A of the upper electrode and the outer...

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Abstract

The invention discloses a thin film bulk acoustic resonance biochemical sensor with annular electrodes. The sensor comprises an upper electrode, a lower electrode, a piezoelectric thin film and a sound isolating layer, wherein the upper electrode has a ring shape comprising an inner layer and an outer layer which are concentric and consists of an inner layer solid circle and an outer layer hollow ring; the lower electrode has a hollow ring shape which is concentric with that of the upper electrode; and the upper electrode and the lower electrode are not superposed in the vertical direction of the rings. The thin film bulk acoustic resonance biochemical sensor approximate to a pure shear wave mode is acquired by the technical scheme, and the sensibility in liquid is greatly improved.

Description

technical field [0001] The invention relates to the technical field of biochemical sensors, in particular to a thin-film bulk acoustic resonance biochemical sensor with ring-shaped electrodes. Background technique [0002] Biochemical sensor is a very important sensory device, which is widely used in industrial control, environmental monitoring, chemical substance analysis, biological gene detection, protein analysis and so on. Existing biochemical sensors mainly include electrochemical sensors, optical fiber sensors, surface plasmon resonance sensors, semiconductor sensors, piezoelectric crystal sensors, and the like. These sensors themselves or their signal analysis devices are large in size, difficult to be integrated and arrayed on a large scale, and the detection time is long and the cost is high. [0003] Thin-film bulk acoustic resonance biochemical sensor is a sensor based on the principle of adsorption mass sensitivity. The sensor uses a piezoelectric film to gener...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N5/02
Inventor 陈达王璟璟梁敏李鹏
Owner SHANDONG UNIV OF SCI & TECH
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