The present invention discloses a ZnO piezoelectric
coating material capable of exciting
pure shear waves, a preparation method thereof, and an application thereof, belonging to the field of
coating materials. The method comprises: using Zn as a target material, depositing ZnO as a ZnO piezoelectric functional layer on the surface of a substrate by magnetron
sputtering; in the magnetron
sputtering, the
sputtering temperature is above 200°C, a
mixed gas of
argon and
oxygen is introduced until the pressure in the cavity is 1.0-2.5 Pa, the sputtering power is 400-700 W, and the sputtering time is 3-6 hours; or, in the magnetron sputtering, the sputtering temperature is 50-200°C, a
mixed gas of
argon and
oxygen is introduced until the pressure in the cavity is 1.0-2.5 Pa, the bias
voltage is ‑100V-‑200V, the sputtering power is 400-700 W, and the sputtering time is 3-6 hours. The present invention adopts magnetron sputtering technology to deposit ZnO on the surface of the substrate as a ZnO piezoelectric functional layer. By adjusting the sputtering temperature or bias
voltage during the magnetron sputtering process, a ZnO piezoelectric
coating material that can excite ultrasonic
pure shear waves is prepared, thereby realizing the measurement of subtle changes in the thickness of the workpiece.