Holographic exposure device of any groove grating structure and exposure method thereof

Abstract

The invention discloses a holographic exposure device of any groove grating structure and an exposure method thereof. The device comprises a laser and a main beam splitter, wherein a beam emitted by the laser is divided into a plurality of beams of light paths through the main beam splitter; each beam of light path passes through a sub-exposure unit; and the sub-exposure unit comprises an adjustable optical attenuator, a beam splitter, a first reflector, a second reflector, a first collimating beam expander, a second collimating beam expander, a rotary platform, piezoelectric ceramic and a driver, a microscope objective set, a CCD (Charge Coupled Device) receiver and a driving circuit, a data acquisition card and a computer. According to the holographic exposure device and the exposure method thereof, holographic manufacturing of any groove grating can be realized by using the idea of Fourier decomposition. A CCD is arranged in the device, so that a vibration drift condition of an interference fringe can be reflected in real time, the piezoelectric ceramic is driven thereby, the locking of the interference fringe is realized, the influence of fringe jitter on long-term exposure is avoided, meanwhile, the phase of each group of interference fringes is accurately controlled according to information on the interference fringes after beam expansion, and matching and superposing of a plurality of groups of interference fringes are realized.

Description

technical field [0001] The present invention relates to a holographic exposure device, in particular to a holographic exposure device with any groove-shaped grating structure based on Fourier synthetic exposure; exposure method. Background technique [0002] Diffraction gratings are the most commonly used spectroscopic devices in spectroscopic instruments, and can be generally divided into ruled gratings and holographic gratings according to their fabrication methods. Scribing gratings is to use a diamond stylus to carve grooves on the grating substrate coated with aluminum film in a non-cutting way to form a grating. The angle of the diamond stylus determines the groove shape of the scribing grating. It takes a long time to mark a master grating by a grating marking machine, usually several days and nights, so the requirements for the environment constant temperature and anti-vibration system are very high, otherwise the thermal expansion of the material and mechanical vib...

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Problems solved by technology

[0004] Chinese invention patent CN200610039967.6 proposes a device for locking interference fringes during holographic exposure. However, this device uses a reference grating to observe the moiré fringes between the interference fringes and the reference grating to judge the vibration of the interference fringes. , belongs to indirect measurement; in addition, the interference optical path placed on the experimental platform vibrates with the reference grating at the same time, so the Moiré fringe jitter is not obvious, which cannot well reflect the actual jitter of the interference fringe

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