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Liquid crystal display panel array substrate and manufacturing method thereof

A technology for liquid crystal display panels and array substrates, which is used in semiconductor/solid-state device manufacturing, optics, instruments, etc., and can solve the problems of non-conduction and high contact resistance.

Inactive Publication Date: 2012-08-22
重庆天胜电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the aluminum metal layer 102 is the most important electrical transmission layer in the entire metal wiring, other metal layers are mainly responsible for solving the problem of adhesion between the metal layer and other layers or the defect problem of aluminum metal in the manufacturing process. However, due to oxidation The existence of aluminum 20 makes the contact resistance of metal wiring and other conductor components very high, and even the situation of non-conduction occurs

Method used

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  • Liquid crystal display panel array substrate and manufacturing method thereof
  • Liquid crystal display panel array substrate and manufacturing method thereof
  • Liquid crystal display panel array substrate and manufacturing method thereof

Examples

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Embodiment 1

[0038] Example 1, please refer to Figure 5 , Figure 5 A front view of an array substrate of a liquid crystal display panel provided by the present invention, in which a plurality of scanning lines 210 are distributed laterally on the substrate (not shown in the figure), and a plurality of data lines 220 are interlaced with the scanning lines, and the scanning lines and The data lines are criss-crossed to form a plurality of pixels, wherein a plurality of thin film transistors are located at the intersection of the scan line 210 and the data line 220, wherein the scan line 210 is connected to the gate 251, the data line 220 is connected to the source 252, and above the gate 251 There are channel layers 253 overlapping and separated by an insulating layer, and the drain electrode 254 is connected to the pixel electrode 256 through the connection hole 255. In addition, there is a common electrode line 230 parallel to the scanning line 210 and located in the pixel area. Therefo...

no. 2 example

[0042] Another embodiment of the present invention provides a method for fabricating metal wiring on an array substrate of a liquid crystal display panel, such as Figure 7A to Figure 7B As shown, firstly, multiple layers of metal films are continuously deposited on the substrate 200. If the metal wiring is formed directly on the substrate, the substrate 200 is a substrate, such as a glass substrate, a plastic substrate, or other flexible substrates. When the metal wiring is formed on another film layer, the base may be another film layer, such as an insulating film. In this embodiment, taking the substrate as an example, three layers of metal films are continuously deposited on the substrate, wherein the bottom layer is a molybdenum metal film 301, the middle is an aluminum metal film 302, and the uppermost metal layer is a molybdenum metal film. 301 is a molybdenum-aluminum-molybdenum structure. The thickness of the aluminum metal film in the present invention is between 250...

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Abstract

The invention relates to a metal wiring of a liquid crystal display panel array substrate and a manufacturing method of the liquid crystal display panel array substrate. The manufacturing method comprises the following steps of: firstly, continuously depositing a plurality of layers of metal films; secondly, etching the metal films to form the metal wiring to ensure that the metal wiring has an inclined side edge comprising an exposed surface; thirdly, treating the inclined side edge of the metal wiring by adopting plasmas of hydrogen; and finally, treating the inclined side edge by adopting plasmas of nitrogen so as to form an aluminum nitride film on the exposed surface of the metal wiring.

Description

【Technical field】 [0001] The invention relates to a liquid crystal display panel array substrate and a manufacturing method thereof, in particular to a liquid crystal display panel array substrate metal wiring and a manufacturing method thereof. 【Background technique】 [0002] With the development of optoelectronic technology, digital video or image devices have become common products in general daily life. In these digital video or image devices, the display is an important human-machine communication interface. Users can read information through the display and then control the operation of the device. [0003] Thin film transistors (TFTs) are driving components used in displays. Such as figure 1 As shown, in general, a thin film transistor includes a gate (gate) 11 , a channel layer (channel) 10 , and components such as a source (source) 12 and a drain (drain) 13 . The gate line 14 and the data line 15 are respectively connected to the gate 11 and the source 12 to inp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1362H01L27/02H01L21/77
Inventor 许民庆高翔
Owner 重庆天胜电子有限公司
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