Optical scanning probe based on dual-rotation micro mirror

Abstract

An optical scanning probe based on a dual-rotation micro mirror comprises a dual-rotation micro mirror, a micro optical system and a silicon optical platform, wherein the dual-rotation micro mirror comprises a micro drive, a plane spring, an annular lens and a circular lens; the output end of the micro drive is connected with the input end of the plane spring; the output end of the plane spring is respectively connected with the input ends of the annular lens and the circular lens; the micro optical system comprises a self-focusing lens and a single mode fiber; the silicon optical platform is used for calibrating and fixing the micro optical system and provides electric connection for the dual-rotation micro mirror; incident light beams transmitted and focused by the micro optical system are deflected by the dual-rotation micro mirror by 90 degrees and vertically enter an imaging object; and light beams reflected by the imaging object are deflected by the dual-rotation micro mirror by 90 degrees and are collected and transmitted to an external optical imaging system.

Description

technical field [0001] The invention relates to an optical scanning probe for two-dimensional circular scanning and three-dimensional helical scanning, in particular double rotating micromirrors are used as the optical scanning device. Background technique [0002] Micro-rotating optical scanning devices have important applications in the field of optical endoscopic imaging. The imaging probe integrated with a micro-rotating optical scanning device can complete a 360-degree circular scan in various diameters of the human body (such as blood vessels, digestive tract, etc.), so as to obtain two-dimensional cross-sectional images or three-dimensional helical scanning images. [0003] Usually, micro-rotating optical scanning devices use micro-rotating motors based on piezoelectric or electrostatic driving principles. Its diameter is generally about 4-5mm, but its length is long, which seriously affects the bending flexibility of the imaging probe where it is located. In order ...

AI Technical Summary

Problems solved by technology

Although the current single electrothermal dual-axis scanning micromirror cannot achieve a mechanical deflection angle of about 45 degrees, the combination of double micromirrors can perfectly bend the incident light by 90 degrees to make the imaging target perpendicular to the incident light after rotating it twice.

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