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Suction system and suction technology

An air extraction system and gas technology, which is applied to liquid variable volume machinery, machines/engines, mechanical equipment, etc., can solve the problems of complex structure of the air extraction system, and achieve the effects of cost reduction, high cost performance and simple structure.

Inactive Publication Date: 2012-09-26
储琦 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the embodiments of the present invention is to provide an air extraction system, which aims to solve the problem of complex structure of the existing air extraction system

Method used

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  • Suction system and suction technology

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Experimental program
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Effect test

Embodiment 1

[0016] Such as figure 1 As shown, the pumping system provided by the embodiment of the present invention includes an arc titanium pump 12 and a vacuum chamber 13 , and the arc titanium pump 12 is directly communicated with the vacuum chamber 13 . In this way, the high vacuum valve between the arc titanium pump 12 and the vacuum chamber 13 can be omitted, the structure is simple, and the total cost of the pumping system is greatly reduced. Compatible with this pumping system, after the arc titanium pump 12 exhausts, before the vacuum chamber 13 is exposed to the atmosphere, the titanium target of the arc titanium pump 12 is cooled for a period of time, thereby reducing the oxidation loss of the titanium target surface and improving The service life of titanium target. This makes the air extraction system extremely cost-effective.

[0017] Usually, the titanium target is cooled by the cooling component of the arc titanium pump 12, which is convenient and quick. Wherein, the c...

Embodiment 2

[0025] The difference from Embodiment 1 is that the arc titanium pump provided by the embodiment of the present invention includes two sets of cathode arc sources 7 and two gas main collecting plates 8, and the two gas main collecting plates 8 are arranged on the opposite two sets of cathodes. between arc sources 7, such as image 3 shown. Here, the cathode arc source 7 is in one-to-one correspondence with the gas main trapping plate 8, and the distance between the two should be large enough, preferably 200-400mm, so that the titanium film deposited on the gas main trapping plate 8 is uniform, It is beneficial to increase the adsorption probability of the titanium film. Due to the addition of a set of cathode arc sources 7 and the matching main gas trapping plate 8, compared with the traditional arc titanium pump of the same size, the pumping speed of the arc titanium pump is increased by about 40%. In order to further increase the pumping speed of the electric arc titanium ...

Embodiment 3

[0028] The difference from the second embodiment is that the gas main collecting plate 15 in the embodiment of the present invention is formed by a plurality of mutually parallel sub-plates 16 arranged obliquely, such as Figure 4 shown. Wherein, the ratio of the width of the sub-boards 16 to the distance between adjacent sub-boards is preferably 1.4-3 times, and the inclination angle of the sub-boards 16 is preferably 40-75°.

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Abstract

The invention is suitable for the technical field of vacuum acquisition, and provides a suction system and a suction technology, wherein the suction system comprises an electric arc titanium pump and a vacuum chamber; and the electric arc titanium pump is communicated with the vacuum chamber directly. Therefore, a high-vacuum valve between the electric arc titanium pump and the vacuum chamber can be eliminated; the structure is simple; and the cost of the suction system is greatly reduced. According to the suction system, after the suction operation of the electric arc titanium pump is finished and before the vacuum chamber is exposed to the air, a titanium target is cooled for a certain time, so as to reduce the oxidization loss on the surface of the titanium target and prolong the service life of the titanium target. Therefore, the performance-price ratio of the suction system can be very high.

Description

technical field [0001] The invention belongs to the technical field of vacuum acquisition, and in particular relates to an air pumping system and process. Background technique [0002] The traditional titanium pump (sublimation titanium pump) is a vacuum pump that uses the principle of sublimation to evaporate the titanium film, and then uses the chemical adsorption of the fresh titanium film to achieve air extraction. The pumping speed of the traditional titanium pump is very high, but the evaporation rate of the titanium membrane is low, the pumping capacity is small, and the utilization rate of the energy consumption of the evaporation is low. Usually, it can only be used for pressure ≤ 10 -4 Pa high vacuum occasions. The pump is used for 10 -2 ~10 -3 In Pa industrial high vacuum occasions, the pumping speed is greatly reduced and the practical value is lost. [0003] With the advancement of science and technology, the current working range of the arc titanium pump ha...

Claims

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Application Information

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IPC IPC(8): F04B37/02F04B37/14
CPCF04B37/14F04B37/02
Inventor 储琦储昕
Owner 储琦
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