The utility model relates to the technical field of
heavy ion generating devices, in particular to a
metal ion generating device for an ECR (
electron cyclotron resonance)
ion source, which comprises an
ion generating cavity, a
microwave feed-in
waveguide tube, a high-frequency high-
temperature induction furnace, a communicating tube sleeve, a heating resistance furnace, a
metal feeding box and a bias
electrode. The
microwave feed-in
waveguide tube, the high-frequency high-
temperature induction furnace, the communicating tube sleeve and the bias
electrode are arranged at the ECR
ion source injection end of the ion generation cavity in a penetrating manner; and one of the heating resistance furnace and the
metal feeding box is arranged on the communicating
pipe sleeve. According to the utility model, three metal ion generation methods of a new MIVOC method, a new high-frequency high-
temperature induction furnace method and a new heating resistance furnace method are integrated, the
crucible temperature of metal ions debugged by an
ion source crucible method is increased, the temperature range of high-temperature
refractory metal ions is widened to 100-3000 DEG C, the energy range of the metal ions is increased, the stability of a lead-out beam is maintained, the use efficiency of a terminal beam is improved, and the service life of the terminal beam is prolonged. And favorable conditions are created for the production of high-temperature
refractory metal ions, and the requirements of users on the high-temperature
refractory metal ions are met.