High-speed impact film tribology testing machine and method for evaluating film impact frictional property

Abstract

The invention provides a high-speed impact film tribology testing machine with a novel structure. The high-speed impact film tribology testing machine comprises a high-speed rotary film sample stage composed of a high-precision gas suspension motor, a cantilever beam locating device, an impact friction pairing sample arranged at the front end of a cantilever beam, an impact movement system composed of a microscope for monitoring the distance between impact friction pairing sample and a film sample, and a signal acquisition system composed of a Doppler laser vibrometer and an acoustic vibration meter sensor. Compared with the prior art, the impact film tribology testing machine disclosed by the invention can precisely evaluate the performances such as impact frictional property, endurance life, contact force characteristics and the like of a micron / nanometer scale film under the condition of ultra-high speed movement and ultra-light impact load.

Description

technical field [0001] The invention relates to the technical field of evaluating the impact friction performance of the surface of a film material, in particular to a test device capable of accurately evaluating the impact friction performance of a micro / nano-scale film under ultra-high-speed motion and ultra-light load conditions, and using the test device to evaluate the film The method of impact friction performance, the test device can test the impact friction, durability life, contact force characteristics, flow and self-healing properties of thin films in the micro-N load range and rotation speed up to 50m / s. Background technique [0002] At present, micro / nano-scale superhard films and lubricant films have been widely used in high-tech fields such as micro-electromechanical systems (MEMS), ultra-high-density disks, and satellite devices. However, many relative motion pairs in these devices are in the mixed contact state of ultra-high frequency vibration and sliding u...

AI Technical Summary

Problems solved by technology

[0003] The technical purpose of the present invention is to provide a film impact friction performance evaluation device with a new structure, which can not only evaluate the impact of micro / nano-scale films under ultra-high rotational speed and ultra-light load, in view of the technical status quo of the above-mentioned film friction testing machine At the same time, it can also obtain the durability life, contact force characteristics, flow and self-healing properties of the film, so as to solve the problem that the current known friction testing machines cannot operate at ultra-high speed (~50m / s) and ultra-light load (micro-new level) at the same time. ) to evaluate the impact and tribological properties of micro / nanoscale films

Images