A kind of conductive polymer modified supercapacitor and preparation method thereof
A technology of conductive polymers and supercapacitors, applied in the direction of electrolytic capacitors, capacitors, capacitor electrodes, etc., can solve the problems of complex process and single method
Inactive Publication Date: 2014-10-15
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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[0005] Aiming at the technical problems of single method and complex process in the existing micro-supercapacitor electrode preparation method, the present invention provides a conductive polymer-modified micro-supercapacitor and a preparation method thereof
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[0029] The present invention will be further described below in conjunction with the embodiments.
[0030] A preparation method for a supercapacitor modified by a conductive polymer, comprising the following steps:
[0031] Step 1: Take two clean silicon substrates with the same shape and size, and coat them with a layer of silicon nitride (such as figure 1 shown), and then use photolithography to etch several pairs of micro-grooves in the same area on each silicon substrate, with the same isolation columns between each pair of micro-grooves (such as figure 2 shown).
[0032] Step 2: Align the micro-grooves of two silicon substrates face to face, and bond them to obtain several pairs of micro-grooves enclosed in the silicon material (such as image 3 shown).
[0033] Step 3: Etch away the silicon material above the entire area corresponding to each pair of micro-grooves plus the isolation column between the pair of micro-grooves, so that the height of the isolation column ...
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A conductive polymer modified supercapacitor and a preparation method thereof belong to the technical field of supercapacitors. The invention adopts MEMS technology to integrate a plurality of miniature capacitors into a single silicon substrate, and the plurality of miniature capacitors are connected in parallel (or connected in parallel after being connected in series) to form supercapacitors. All microcapacitors consist of a pair of microgrooves with a spacer between them, the height of which is lower than the depth of the microgrooves; the walls of the microgrooves are deposited with metal electrode layers and conductive polymer films ; The inside of the micro-groove is filled with electrolyte and then sealed and packaged. In the process of making microcapacitors, a simple and effective direct chemical polymerization conductive polymer film is used on the metal electrode layer to modify the capacitor electrodes to increase the specific capacity of the microelectrodes and reduce the equivalent series resistance. The conductive polymer modified supercapacitor provided by the invention has the characteristics of large specific capacity and high integration, and can be used as various power sources or energy storage devices.
Description
technical field [0001] The invention belongs to the technical field of supercapacitors, in particular to supercapacitors modified by conductive polymers and a preparation method thereof. Background technique [0002] With the development of social economy, people pay more and more attention to green energy and ecological environment. Supercapacitors, also known as electrochemical capacitors, are a new type of energy storage device between traditional capacitors and batteries. Compared with traditional batteries, supercapacitors have higher energy density, power density and long cycle life. As a clean and efficient new energy storage device, more and more researchers have paid attention to them. The development of supercapacitor technology The core is the electrode material. According to the definition of supercapacitors by Professor B.E.Conway, an international authority in the field of supercapacitor research, supercapacitors can be divided into two categories: one is ele...
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IPC IPC(8): H01G9/26H01G9/04
CPCY02E60/13
Inventor 徐建华陈燕王偲宇杨文耀杨亚杰龙菁
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA