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Analyzing method of phase information, analyzing program of the phase information, storage medium, and x-ray imaging apparatus

A technology of phase information and analysis method, applied in the field of analysis of phase information

Inactive Publication Date: 2012-10-24
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0018] Compared with the conventionally used general Fourier transform method, the above windowed Fourier transform method disclosed in Non-Patent Document 1 has the advantage of improving the noise resistance of the image but has the following disadvantages

Method used

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  • Analyzing method of phase information, analyzing program of the phase information, storage medium, and x-ray imaging apparatus
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  • Analyzing method of phase information, analyzing program of the phase information, storage medium, and x-ray imaging apparatus

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Experimental program
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Embodiment

[0096] Hereinafter, the present embodiment is described.

no. 1 example

[0098] In this embodiment, a calculation example by computer simulation is described. The parameters used in the simulation are as follows.

[0099] First, assume that the X-rays emitted from the X-ray source 210 have energy of 17.7 keV and coherent incident X-rays of a wavelength (i.e., with a constant phase wavefront).

[0100] Incident X-rays are subjected to phase wavefront changes through the subject 220 . like Figure 4 As shown, the subject used in this embodiment is assumed to be made of four calcium-phosphorus spheres 41 each having a diameter of 200 μm that are stacked.

[0101] Here, a 4 μm striped π grating (striped pattern) was used as the phase grating described above.

[0102] Here, the 4μm striped π grating refers to the Figure 5A The stripe pattern shown, in which the portion 501 where the phase of the incident X-ray undergoes a change of π and the portion 502 where the phase does not undergo a change are set at a ratio of 1:1, and a pair of stripe patt...

no. 2 example

[0114] Unlike the first embodiment which uses a stripe pattern as a phase grating, the second embodiment uses a 4 μm checkerboard π grating (checkerboard pattern).

[0115] Here, the 4 μm checkerboard π grating refers to a shape in which a portion 511 whose phase undergoes a π change and a portion 512 where the phase does not undergo a change alternately exhibit a checkerboard pattern, as Figure 5B shown.

[0116] In the same manner as the first embodiment, the size of the full width at half maximum of the window function is two pixels on the image. At this time, the moiré image detected by the detector 250 has Figure 8 The 2D structure shown.

[0117] Figures 9A-10B Differential images of the recovered phase wavefronts for comparison between the prior art and the present embodiment are shown, respectively. Figure 9A A differential image of the phase wavefront along the Y axis in the prior art is shown. Figure 9B A phase wavefront differential image along the Y axis ...

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Abstract

An analyzing method for deriving phase information by analyzing a periodic pattern of moire comprises steps of: subjecting at least a part of the periodic pattern of moire to a windowed Fourier transform by a window function; calculating analytically, based on the moire subjected to the windowed Fourier transform, information of a first spectrum carrying the phase information, and information of a second spectrum superimposed on the information of the first spectrum; and separating the information of the first spectrum from the information of the second spectrum, to derive the phase information.

Description

technical field [0001] The invention relates to a phase information analysis method, a phase information analysis program, a storage medium and an X-ray imaging device. [0002] In particular, the present invention relates to techniques for computing the phase front of an original incident wave or the differential of a phase front from a periodic pattern such as a moiré (interference pattern or intensity pattern) obtained by combining with Any phase wavefront produced by the interference of an incident wave such as light. Background technique [0003] There are known techniques for causing interference by using waves having various wavelengths including light and X-rays for shape measurement of an inspected object. [0004] According to the above measurement technique, (coherent) incident light with a constant phase wavefront is irradiated onto the object and is reflected or transmitted. [0005] It is known that reflected light or transmitted light changes the wavefront a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/25G01B15/00G21K7/00
CPCG01B15/00G01B11/254G21K2207/005
Inventor 长井健太郎
Owner CANON KK
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