Laser damage testing device for optical thin film

A technology of laser damage and testing equipment, which is applied in the direction of measuring equipment, scientific instruments, weather resistance/light resistance/corrosion resistance, etc. It can solve the problems of difficulty in obtaining a wide range of light intensity parameter changes, uneven irradiation spots, etc., and achieve convenience The effect of optical path layout and parameter adjustment, improving measurement accuracy and reducing protection requirements
CN102778426AInactive Publication Date: 2012-11-14NORTHWEST INST OF NUCLEAR TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
NORTHWEST INST OF NUCLEAR TECH
Publication Date
2012-11-14
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a laser damage testing device for an optical thin film. The laser damage testing device comprises an optical power energy measurement instrument, wherein an aperture, a first lens, an optical attenuator, a sampling beam splitter and a focusing lens are arranged between a laser device and a coated lens to be tested in sequence; the aperture is arranged on the front focal plane of the first lens, and the coated lens to be tested is arranged on the rear focal plane of the focusing lens; and the incident transmission light of the sampling beam splitter enters the focusing lens, and the reflection light enters the optical power energy measurement instrument. According to the laser damage testing device, the infinite microscopic imaging mode is adopted, the uniform radiation on an image plane is obtained, the wide-range adjustable optical attenuation is realized, the needed spot size can be easily obtained, and the test requirement of high-power excimer laser system on film damage is met.
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Description

technical field

[0001] The invention relates to an optical thin film testing device, in particular to an optical thin film laser damage testing device suitable for a high-power excimer laser system. Background technique

[0002] Excimer laser systems are applied to a variety of optical thin films, and thin film laser damage measurement is of great significance to the reliability of the system. The laser damage test of optical thin films not only requires uniform irradiation, but also needs to change the laser power density incident on the thin film in a wide range to meet the requirements of various devices. changes for accurate and reliable measurements.

[0003] "Intense Lasers and Particle Beams" (Vol.10, 1998, p123-126 and Vol.20, 2008, p509-512) disclosed a method for laser damage testing of optical thin films based on single lens focusing. Because of the love spot, it is difficult to obtain the desired uniform irradiation.

[0004] In terms of beam attenuation and l...

Claims

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