Manufacturing method of multi-needle point array used for large area friction induced micro/nano-processing

Abstract

The invention relates to a manufacturing method of a multi-needle point array used for large area friction induced micro / nano-processing. The method comprises the steps of: (a) using the pressure head of a microhardness tester to conduct indenting on a wax sheet substrate surface for processing an indentation array; (b) placing microspheres on each indentation; (c) covering the microspheres with a flat and smooth pressing sheet, exerting a load on the pressing sheet to make each microsphere pressed into the wax sheet simultaneously, thus forming a microsphere array; (d) pressing a pouring frame on the wax sheet substrate, and making the microsphere array framed by the pouring frame; (e) pouring an inlay material solution into the pouring frame, and making the solution submerge the microsphere array; and (f) after solidification of the inlay material solution, conducting heating and melting to remove the wax sheet, then taking the inlay material out from the pouring frame, and polishing the microsphere-free back of the inlay material to a plane, thus obtaining the multi-needle point array used for large area friction induced micro / nano-processing. The method has the advantages of simple operation, cheap raw materials, no need for glue spraying, oxidation, photoetching, anisotropic etching and other complex and special treatments, thus having the obvious characteristics of low cost and high efficiency.

Description

technical field [0001] The invention relates to a method for fabricating a multi-point array for large-area friction-induced micro / nano processing. Background technique [0002] Since the 21st century, the miniaturization revolution triggered by semiconductor microelectronics technology has entered a new era, which is the era of nanotechnology. Because nanotechnology runs through various fields and brings fundamental changes to old traditional technologies, it is called an upcoming technological revolution. Today, nanotechnology (NT), biotechnology (BT) and information technology (IT) have become the three most influential fields in the scientific and technological circles. Among them, nanotechnology occupies an increasingly important position in modern science and industry. [0003] Nano-manufacturing is the way to realize the transformation of nano-technology from functional principles to manufacturing principles, and it is also the basis for supporting nano-technology t...

AI Technical Summary

Problems solved by technology

However, the current technology has certain limitations: for example, the lithography equipment is becoming more and more complex, and the development cost of the lithography system is increasing exponentially, which has caused the manufacturing cost of the equipment to be almost out of control; the stencil production of nanoimprint technology is facing challenges Challenges such as high cost, low efficiency, and low precision

At present, friction-induced micro / nano-fabrication technology is mainly completed by scanning probe microscope, which generally can only work in single-probe mode, with slow processing speed and low efficiency

Moreover, its processing range generally does not exceed 100 microns, and it is difficult to meet the requirements of mass production, which seriously hinders the application of friction-induced micro / nano processing technology.

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