Miniaturization micromechanical filter

A filter and micro-mechanical technology, which is applied in waveguide devices, chemical instruments and methods, instruments, etc., can solve the problems of large device volume, lower substrate dielectric constant, etc., and achieve reduced filter volume and good consistency , the effect of reducing the volume
CN102790248AActive Publication Date: 2012-11-21CHINA ELECTRONICS TECH GRP NO 26 RES INST
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHINA ELECTRONICS TECH GRP NO 26 RES INST
Publication Date
2012-11-21

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Abstract

The invention discloses a miniaturization micromechanical filter. The filter is manufactured based on micromechanical process and formed by overlying upper and lower layers of medium materials, an interdigitated metal electrode layer is arranged on the lower surface of the upper medium layer, ground connection bonding welding rings are arranged on the upper surface of the lower medium layer, cavities prepared by etching process are formed among the welding rings, through holes are arranged on the upper and lower medium layers, metal layers are arranged on the inner walls of the through holes, surface electrode layers are arranged on the surfaces of the upper and lower medium layers, and input and output lead wires are arranged on the surface of the upper medium layer. The filter can meet index requirements of high operating frequency, large bandwidth, small loss and the like of a microwave filter and has the advantages of being small in size, fully sealed and high in reliability.
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Description

technical field

[0001] The invention relates to a micro-mechanical filter, in particular to a miniaturized micro-mechanical filter based on a micro-mechanical manufacturing process. Background technique

[0002] With the expansion of the amount of communication information and the complexity of the whole system, the requirements for the small size of the microwave filter are becoming more and more urgent for the whole system. Traditional cavity filters, dielectric filters and other filters are too large to meet the volume requirements of the system. Due to the low temperature co-fired ceramic (LTCC) filter adopts the ceramic sintering process, the process consistency is difficult to guarantee.

[0003] Micromechanical filter is a new type of filter that was born in recent years. It uses silicon substrate or quartz substrate as the base material, and successfully combines micromechanical technology and microwave filter design technology. In addition to the high precision of ...

Claims

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