Unlock instant, AI-driven research and patent intelligence for your innovation.

Liquid filtration method

A filtration method and liquid technology, which can be applied in filtration separation, membrane filter, liquid degassing and other directions, can solve the problem that the filter cannot obtain sufficient effect, and achieve the effect of improving filtration efficiency, low cost, and long life.

Inactive Publication Date: 2012-12-19
FUJIMI INCORPORATED
View PDF6 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in these methods, IPA, surfactant, etc. remain in the pores of the filter after the treatment, so in order to remove them, it is necessary to sufficiently wash with a cleaning liquid such as a large amount of water, and there are problems in terms of cost and efficiency.
On the other hand, a method of immersing a hydrophobic porous membrane in deaerated water is disclosed (Patent Document 2), but according to studies by the inventors of the present invention, it has been found that a sufficient effect cannot be obtained only by immersing the filter in deaerated water. , there is still room for improvement as a pre-processing

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Liquid filtration method
  • Liquid filtration method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1~6

[0048] As a filter member for filtering non-degassed liquid, prepare a depth filter with a total length of about 50 cm (filter size: total length about 50 cm; outer diameter about 7 cm; inner diameter about 2.8 cm), and follow the pretreatment conditions shown below Deaerated water was passed through it, and pretreatment was carried out.

[0049] pretreatment conditions

[0050] Degassed water flow rate: 19L / min

[0051] Degassed water flow time: 0.25 minutes, 0.5 minutes, 1 minute, 2 minutes, 5 minutes or 30 minutes

[0052] Dissolved oxygen concentration in degassed water: 0.5mg / L

[0053] Degassed water production method: Membrane degassing method (a method in which ultrapure water is introduced into the hollow fiber membrane module to make the outside of it a vacuum, thereby removing the dissolved gas (hollow fiber: poly-4-methylpentane ene-1, vacuum pressure: 2.7kPa))

[0054] Next, non-degassed ultrapure water was prepared as the non-degassed liquid, and the filtrati...

Embodiment 7 and comparative example 7

[0068] A filter having the same material and shape as in Example 1 was prepared except for the filtration precision, and pretreated under the following conditions.

[0069] Degassed water flow rate: 15L / min

[0070] Degassed water flow time: 3.3 minutes

[0071] The volume ratio X / Y of the throughput X of the degassing liquid to the capacity Y of the filter member:

[0072] 40

[0073] Dissolved oxygen concentration in degassed water and degassed water manufacturing method: same as Example 1

[0074] Next, as the non-degassed liquid to be filtered, a polishing slurry containing fumed silica having an average particle diameter of 30 nm at a concentration of 13% by weight was prepared, and filtered using a pretreated filter according to the following procedure: condition to filter. At this time, the filtration efficiency was measured immediately after the start of filtration, when 100 L was passed, when 200 L was passed, and when 300 L was passed. In addition, the time requ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle sizeaaaaaaaaaa
Login to View More

Abstract

Disclosed is a liquid filtration method that extends filter life and achieves high filtration efficiency, and also an abrasive slurry produced by said method. In this liquid filtration method, a filter is decompression-treated in a solvent-filled sealed container before liquid is filtered thereby, after which the filter is used for filtering.

Description

technical field [0001] The present invention relates to a method for filtering various non-degassed liquids, and particularly relates to a method for filtering a polishing slurry containing fine particles such as abrasive materials as a dispersoid. Background technique [0002] In polishing processes using abrasive slurries and polishing pads, the level of requirements for surface smoothness and defect-freeness of the processed surface is increasing year by year. Accordingly, selection of a polishing slurry having a smaller particle diameter of fine particles such as abrasives contained in the polishing slurry has gradually begun. Here, even if an abrasive having a small average particle diameter is selected, the particle diameters of fine particles such as abrasive generally have a particle size distribution, and may contain coarse particles that are very large compared to the desired particle diameter. In this case, the coarse particles may cause surface defects such as s...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B01D37/04B24B57/02
CPCB01D41/00B01D37/00B24B57/02B01D2239/0618B01D2239/0428B01D37/04B01D19/00
Inventor 森永均杉山博保三轮直也
Owner FUJIMI INCORPORATED