Device and method for placing predetermined element on target platform
A component and target technology, applied in the structural field of detecting and improving component placement accuracy, can solve problems such as monitoring chips, and achieve the effects of improving placement accuracy, reducing rework, and improving yield
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[0043] According to the present invention, alignment and probing techniques are described that improve the accuracy of component placement in assembly. More specifically, the present invention includes structures and methods for detecting and improving component placement accuracy on a target platform by incorporating alignment marks onto the component and reference marks onto the target platform using various probing techniques. A set of sensors in an array to form a multi-sensor probe capable of detecting deflection of a displacement element during assembly. Merely by way of example, the invention is applied to placing packaged devices on electronic substrates for electronic system fabrication. It should be realized, however, that the invention has broader applicability. Further details of the invention can be found throughout the specification of the invention, and in more detail below.
[0044] alignment mark
[0045] According to a preferred embodiment, the alignment...
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