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Micro-jet electroforming nozzle

A technology of jet electroforming and nozzle, which is applied in the direction of electroforming and electrolysis, can solve the problems of reducing the shape quality and performance of electroforming layers/parts, restricting the deepening application of jet electroforming technology, and large equal-diameter shooting range, etc., to achieve reduction The effect of processing cost, high processing accuracy and increasing the equal-diameter range

Inactive Publication Date: 2015-03-25
HENAN POLYTECHNIC UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, based on conventional structural features, it is extremely difficult to obtain high-quality micro-jet (jet diameter as small as a few microns, large equal-diameter range, and high flow rate), which restricts the in-depth application of jet electroforming technology, such as high-integration Wiring Process for Chips
In addition, when electroforming is carried out based on the jet sprayed by the nozzle with the above-mentioned traditional structure, since the deposited metal layer is easy to contact with the oxygen in the surrounding environment, the electroformed layer of some easily oxidized metals often contains oxide impurities, which reduces the electroformed layer / shape quality and performance

Method used

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Embodiment Construction

[0027] Such as figure 1 , figure 2 with image 3 As shown, a micro-jet electroforming nozzle of the present invention includes a nozzle body 3 having a cavity 8, the nozzle body 3 is provided with a liquid inlet port 1 and an air inlet port 2, and the cavity 8 of the nozzle body 3 is provided with The nozzle pipe 7 connected to the liquid inlet interface 1 is detachably sealed with a nozzle cap 5 outside the nozzle 4, and the nozzle cap 5 is provided with a diversion hole 6, and the center lines of the nozzle 4, the nozzle pipe 7 and the diversion hole 6 coincide. There is a gap between the inlet end face of the diversion hole 6 and the outlet end face of the nozzle 7, and the nozzle body 3 is provided with a conductive fine-tuning mechanism that extends into the cavity 8 and is connected with the nozzle 7, and the cavity 8 is filled with Inert gas under pressure.

[0028]The conductive centering fine-tuning mechanism includes a clamping body 9, an X-direction terminal 12-...

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Abstract

A micro-jet electroforming nozzle comprises a nozzle body which is provided with a cavity. A liquid inlet interface and an air inlet interface are arranged on the nozzle body, a spray pipe which is connected with the liquid inlet interface is arranged in the cavity of the nozzle body, a nozzle cap is detachably connected to the outside of a spout in a sealing mode, a guide hole is opened in the nozzle cap, central lines of the spout, the spray pipe and the guide hole are overlapped, gaps are arranged between an inlet end face of the guide hole and an outlet end face of the spray pipe, a conductive central fine tuning mechanism which stretches into the cavity and connected with the spray pipe is arranged in the nozzle body, and the cavity is filled with inert pressure gas. According to the micro-jet electroforming nozzle, traditional thinking of obtaining micro jets by depending on reducing apertures and optimizing geometric construction is broken through, flow beams are focused and accelerated by using auxiliary high-speed airflows, limits of traditional methods on geometric construction and process realization aspects are overcome, the process cost is reduced, diameters of limit jet beams are greatly reduced, effective and a stable diameter range is increased, and process capabilities of jet electroforming are enhanced and performances of electroforming layers or pieces are improved.

Description

technical field [0001] The invention relates to a jet electroforming nozzle, in particular to a micro-jet electroforming nozzle. Background technique [0002] Electroforming is a special processing technology based on the principle of electrochemical deposition for the preparation of metal layers / parts. Because of its advantages of being able to reproduce fine textures, low process costs, large material selectivity, and a wide range of applicable scales, it is often used in the manufacture of precision, fine, and special-shaped metal structures and parts. Electroforming can be divided into molded electroforming and moldless electroforming. In contrast, the patternless electroforming that directly induces and controls the growth of the metal layer through the cathode or anode has good development prospects in the manufacture of three-dimensional complex metal microstructures because it does not require a special mandrel and the metal layer can grow freely in three dimensions...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D1/00
Inventor 明平美吕文星吕印定商静瑜王俊涛郝巧玲包晓慧苏阳阳聂子超张延辉王贝李二静
Owner HENAN POLYTECHNIC UNIV
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