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Purification method for electronic grade isopropanol recovered liquid

The technology of an electronic grade isopropyl alcohol and a refining method is applied in the refining field of the electronic grade isopropyl alcohol recovered liquid, which can solve problems such as defects in the manufacturing process, and achieve the effects of saving energy and reducing costs.

Active Publication Date: 2013-02-27
JIANGSU YINGTIAN CHEM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This can be a hindrance that causes defects in the manufacturing process

Method used

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  • Purification method for electronic grade isopropanol recovered liquid

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Effect test

Embodiment 1

[0019] A method for refining electronic grade isopropanol recovery liquid, comprising the following steps,

[0020] (1) Add 100kg of activated carbon and 2 tons of anhydrous calcium chloride to 10 tons of isopropanol recovery solution containing 25% water, decolorize and remove water from the isopropanol recovery solution, and then filter to remove activated carbon, calcium chloride, and isopropanol Some solid impurities in the propanol recovery liquid, thereby obtain 8.5 tons of isopropanols of content 88%.

[0021] (2) Add 8.5 tons of isopropanol obtained in step (1) to 100 kg of dehydrating agent calcium oxide, and after reflux for 5 hours, remove the solid by filtration, and pass the isopropanol filtrate through an ion exchange resin column to remove metals in the isopropanol filtrate Impurities such as ions were removed to obtain 7.5 tons of purer isopropanol, and its conductance was 20 μS / cm.

[0022] (3) After rectifying 7.5 tons of isopropanol obtained in step (2), th...

Embodiment 2

[0024] A method for refining electronic grade isopropanol recovery liquid, comprising the following steps,

[0025] (1) Add 120kg of activated carbon and 2.1 tons of anhydrous calcium chloride to 10 tons of isopropanol recovery solution containing 20% ​​water, decolorize and remove water from the isopropanol recovery solution, and then filter to remove activated carbon, calcium chloride, and isopropanol Some solid impurities in the propanol recovery liquid, thereby obtain 9 tons of isopropanols of content 88%.

[0026] (2) Add 9 tons of isopropanol obtained in step (1) to 120 kg of dehydrating agent calcium oxide, and after reflux for 4 hours, remove the solid by filtration, and pass the isopropanol filtrate through an ion exchange resin column to remove the metal in the isopropanol filtrate Impurities such as ions were removed to obtain 7.8 tons of purer isopropanol, and its conductance was 25 μS / cm.

[0027] (3) After rectifying 7.8 tons of isopropanol obtained in step (2),...

Embodiment 3

[0029] A method for refining electronic grade isopropanol recovery liquid, comprising the following steps,

[0030] (1) Add 320kg of activated carbon and 2.5 tons of anhydrous calcium chloride to 10 tons of isopropanol recovery liquid containing 27% water, decolorize and remove water from the isopropanol recovery liquid, and then filter to remove activated carbon, calcium chloride, and isopropanol Some solid impurities in the propanol recovery liquid, thereby obtain 8.3 tons of isopropanols of content 87%.

[0031] (2) Add 8.3 tons of isopropanol obtained in step (1) to 150 kg of dehydrating agent calcium oxide, and after refluxing for 3 hours, remove the solid by filtration, and pass the isopropanol filtrate through an ion exchange resin column to remove metals in the isopropanol filtrate Impurities such as ions were removed to obtain 7.4 tons of purer isopropanol, and its conductance was 30 μS / cm.

[0032] (3) After rectifying 7.4 tons of isopropanol obtained in step (2), t...

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Abstract

The present invention obtains electronic grade isopropanol capable of being recycled through recovering the isopropanol recovered liquid in the electronic industry. A purification method for electronic grade isopropanol recovered liquid comprises the following steps: (1) adding a certain amount of activated carbon and anhydrous calcium chloride to an isopropanol recovered liquid, decolorizing and dewatering the isopropanol recovered liquid, and then filtering to remove the activated carbon and the calcium chloride as well as some solid impurities in the isopropanol recovered liquid to obtain isopropanol with a content of 87-88%; (2) adding a dewatering agent to the isopropanol obtained from the step (1), refluxing for 3-5 hours, removing the solid by filtration, and removing the metal ions and other impurities in the isopropanol by passing through an ion exchange resin column to obtain relatively pure isopropanol; and (3) distilling the isopropanol from the step (2) and separating to give the product. The purification method can meet the requirements of the electronic cleaning industry, and has the characteristics of simple process, high product purity, and low production cost.

Description

technical background [0001] Semiconductor manufacturing operations require wafer surfaces to be as clean as possible. Sometimes, this is difficult to do, especially when wafers or chips are cleaned with an aqueous solution and then dried. The drying process often creates stains, leaving undesirable residues on the surface. This can be a hindrance that causes defects in the manufacturing process. After aqueous cleaning, electronic-grade isopropanol is used in the production process of large-scale and ultra-large-scale integrated circuits (IC), mainly in the cleaning process, because of its good performance of rapid vaporization and no residue. Cleanliness and cleanliness have a very important impact on the yield, electrical performance and reliability of integrated circuits. [0002] After cleaning with isopropanol, the water content of isopropanol is about 10%, and it also contains some metal ions. Whether the isopropanol recovery solution can be recycled and still meet th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07C31/10C07C29/76
Inventor 杨水清罗伟李海建
Owner JIANGSU YINGTIAN CHEM
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