Precision positioning vibration isolation platform

Abstract

The invention discloses a positioning vibration isolation platform. The precision positioning vibration isolation platform comprises a positioning vibration isolation device and an active controller which are electrically connected, wherein the active controller controls position and vibration of the positioning vibration isolation device; the positioning vibration isolation device comprises three supporting legs and a load flat plate; the three supporting legs are distributed at the vertexes of a regular triangle and are used for supporting the load flat plate; each supporting leg is provided with a spiral spring serving as a main supporting part; a displacement sensor is arranged below a connecting plate and is used for detecting the displacement of the connecting plate; a vertical speed sensor is arranged at the position, corresponding to the supporting legs, of a load platform; and the active controller adopts a master-slave open structure, consists of an upper control computer and a lower execution controller and is used for keeping the load platform at the set position and effectively isolating the influence of ground vibration on the precision of the platform. The precision positioning vibration isolation platform can be widely applied in the fields of precision processing, precision measurement, optical tests and the like with special requirements on the precision of the plane position.

Description

technical field [0001] The invention belongs to the field of precision positioning vibration isolation, and in particular relates to a precision positioning vibration isolation platform. Its main function is to ensure that the equipment placed on the load plate has high vertical positioning accuracy and can effectively isolate the foundation vibration. Background technique [0002] With the transformation of the manufacturing industry from precision manufacturing to ultra-precision manufacturing, and the continuous improvement of the requirements for measurement technology and optical experiment accuracy, the positioning accuracy of the support platform has gradually increased the impact on the overall performance of the equipment, which affects the positioning of the support platform. Accuracy puts forward higher requirements. For example, the support systems of various microscopes, the reference platform of optical imaging and lithography workpieces and optical detection ...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the lack of precision of the currently commonly used support platforms, the present invention provides a precision positioning vibration isolation platform based on voice coil motors and cylindrical air bearing guide rails. The vibration isolation platform has a large stroke, fast response, good vibration isolation performance, and High precision

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