Air conditioning monitoring system

Abstract

The invention discloses an air conditioning monitoring system which is applied to semiconductor cleaning equipment. The system comprises a main frame, a fan unit, a fan fixed support, a wind uniformizing device, an adjustable laminar flow device, a gas pressure sensor, a static impedance device, a static monitor and an air cleanliness test device. The air conditioning monitoring system is mainly used for eliminating various pollution sources in the internal environment of a semiconductor cleaning machine to cause the internal part of the semiconductor cleaning machine to be always in a steady laminar flow environment with a constant pressure value, effectively prevents and removes particles and dust in the air, conveniently knows the internal cleanliness of equipment, and effectively eliminates static electricity generated in the internal part of the equipment, therefore the possibility that silicon wafers are polluted by critical defects is reduced, finally, the rate of finished products of chips is increased, and the production cost of electron parts and components is reduced.

Description

technical field [0001] The invention relates to the technical field of ultra-clean systems, in particular to an air conditioning monitoring system applied inside semiconductor cleaning equipment. Background technique [0002] Semiconductor cleaning equipment has extremely high requirements on the cleanliness of the internal environment. However, due to the influence of the equipment itself and the surrounding environment of the equipment, there are always pollution sources such as particles and metal impurities inside. At the same time, during the operation of the equipment, the movement of the moving parts inevitably produces friction. In the silicon wafer processing environment with low relative humidity, friction can easily generate high-level static charges, which become another source of pollution on the surface of the silicon wafer. These pollution sources can make the chip on the silicon wafer electrically invalid. According to statistics, 80% of chip scrapping is cau...

AI Technical Summary

Problems solved by technology

However, certain particles will still be introduced into the air outlet of the fan, and when the difference between the wind speed air intake volume and the exhaust air volume is too large, the air in the chamber will generate turbulent flow, so there are still defects in the prior art.

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