A New Type of Dryer Filter Heating System

Abstract

The invention provides a novel spin dryer filter heating system, which comprises a heated cavity, a heating nozzle, a temperature controller, a heater and a heating cavity, wherein the heating nozzle is arranged on one side of the heated cavity; the heating nozzle is connected to the heating cavity; a high-temperature gas filter is arranged between the heating nozzle and the heating cavity; the heater is arranged at the rear end of the heating cavity; one end of the downside of the heating cavity is connected with a gas intake pipe; the gas intake pipe is provided with a low-temperature gas filter; the other end is provided with an outlet gas temperature detecting probe; the outlet gas temperature detecting probe is connected with the temperature controller. The novel spin dryer filter heating system disclosed by the invention can ensure that the cleanliness of nitrogen blown into the cavity can meet requirements, and no contamination exists in the cavity; the probability of bad products occurring in the cleaning and drying links is reduced, and the yield of products is improved by 1%; the production cost is reduced, the yield is reduced, and the economic benefits are improved.

Description

technical field [0001] The invention relates to the technical field of LED production, in particular to a novel dryer filter heating system. Background technique [0002] In the modern LED manufacturing process, some wafers are polluted to varying degrees during the epitaxial production process, so epitaxial cleaning and drying, and evaporation of ITO are required before MESA lithography, evaporation ITO deposition, and SIO2 deposition. Pre-cleaning, cleaning before depositing SIO2, and after these cleaning steps, a dryer must be used. The function of the dryer is to clean the chip in various chemical liquids and then put it into the dryer to rinse the chip again , drying, and then proceed to the next process in order to produce qualified LED products. [0003] At present, the design ideas of the heating system in most dryer production industries at home and abroad are as follows: nitrogen, filter, heating rod, cavity, and drying wafer. There are certain defects in this de...

AI Technical Summary

Problems solved by technology

There are certain defects in this design: the heating rod is easily oxidized by a small amount of oxygen at high temperature, resulting in dim color in the heating area of ​​the heating rod after a period of use, obvious oxidation phenomenon on the surface of the heating rod, and a small amount of solid particles on the surface of the heating rod, etc. Impurities are brought into the cavity under the action of high-pressure nitrogen, and then adhere to the clean chip, polluting the product and reducing the product yield; there is no real-time temperature monitoring, and the temperature cannot be set.

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