Controllable heating and defrosting capacitive type high-altitude humidity sensor and manufacturing method thereof

A humidity sensor and temperature sensor technology, which is applied in the fields of material capacitance, manufacturing microstructure devices, decorative art, etc., can solve the problems of sensor frosting, affecting humidity data collection, etc., and achieve the effect of improving accuracy

Inactive Publication Date: 2013-04-03
HARBIN UNIV OF SCI & TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention aims to solve the problem of frosting on the surface of the sensor due to the low temperature of the existing humidity sensor in the high-altitude environment (min

Method used

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  • Controllable heating and defrosting capacitive type high-altitude humidity sensor and manufacturing method thereof
  • Controllable heating and defrosting capacitive type high-altitude humidity sensor and manufacturing method thereof
  • Controllable heating and defrosting capacitive type high-altitude humidity sensor and manufacturing method thereof

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specific Embodiment approach 1

[0022] Specific implementation mode one: combine figure 1 , figure 2 , image 3 and Figure 4 , this embodiment is a controllable heating and defrosting capacitive high-altitude humidity sensor, including a substrate 1, a first insulating layer 2, a first temperature sensor pad 3, a second temperature sensor pad 4, and a first heater pad 5. The second heater pad 6, the temperature sensor electrode 7, the heater electrode 8, the second insulating layer 9, the lower electrode 10, the moisture sensing layer 11, the porous upper electrode 12 and the groove 13; The first insulating layer 2 is laid on the surface; a temperature sensor electrode 7 and a heater electrode 8 are arranged on the upper surface of the first insulating layer 2, and the first temperature sensor pad 3 and the second electrode are connected to the two ends of the temperature sensor electrode 7. The temperature sensor pad 4 is connected to the first heater pad 5 and the second heater pad 6 at both ends of t...

specific Embodiment approach 2

[0031] Specific implementation mode 2: This implementation mode is a preparation method of a controllable heating and defrosting capacitive high-altitude humidity sensor, which is specifically completed according to the following steps:

[0032] 1. Prepare a silicon wafer with a crystal orientation of [100] and a thickness of 150 μm to 250 μm as the substrate 1, and clean the surface of the substrate 1;

[0033] 2. The surface of the silicon wafer is oxidized, and a layer of dense SiO is obtained on the surface of the silicon wafer 2 layer, namely the first insulating layer 2;

[0034] 3. Prepare temperature sensor electrodes 7 and heater electrodes 8 on the upper surface of the substrate processed in step 2 by photolithography stripping method, connect the two ends of the temperature sensor electrodes 7 to the first temperature sensor pad 3 and the second temperature sensor respectively The two ends of the heater electrode 8 are connected to the first heater pad 5 and the se...

specific Embodiment approach 3

[0041] Embodiment 3: The difference between this embodiment and Embodiment 2 is that the thickness of the first insulating layer 2 is 500 nm to 1000 nm. Others are the same as in the second embodiment.

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Abstract

The invention discloses a manufacturing method of a controllable heating and defrosting capacitive type high-altitude humidity sensor, relates to the field of high-altitude humidity sensors and the manufacturing method thereof, and solves the problem that the humidity data acquisition operation is seriously influenced as the surface of the conventional humidity sensor is frosted due to excessively low temperature in a high-altitude environment. The high-altitude humidity sensor is characterized by comprising a base, a first insulation layer, a first temperature sensor bonding pad, a second temperature sensor bonding pad, a first heater bonding pad, a second heater bonding pad, a temperature sensor electrode, a heater electrode, a second insulation layer, a lower electrode, a humidity sensing layer, an upper porous electrode and a groove. The manufacturing method comprises the steps as follows: manufacturing the high-altitude humidity sensor by adopting the methods of photo-etching stripping, magnetic control radio-frequency sputtering, corrosion hollowing, spin coating and evaporation coating. The high-altitude humidity sensor is suitable for the fields of climate and weather.

Description

technical field [0001] The invention relates to the field of a high-altitude humidity sensor and a preparation method thereof. Background technique [0002] Climate change is closely related to people's production and life, and directly affects people's activities such as productive labor, transportation, and aerospace. The humidity in the atmosphere is one of the main climate parameters. With the continuous development of science and technology, people's demand for atmospheric humidity detection continues to increase, and it is required to be able to obtain high-altitude humidity data accurately and quickly. However, the high-altitude environment has a changeable climate and harsh environment. The lowest temperature can reach -75°C), so that when the existing humidity sensor is applied in a high-altitude environment, frosting will appear on the surface of the sensor, which will seriously affect the humidity data collection. [0003] The purpose of this invention is to int...

Claims

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Application Information

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IPC IPC(8): G01N27/22B81C1/00
Inventor 施云波罗毅赵文杰冯侨华
Owner HARBIN UNIV OF SCI & TECH
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