Anti-reflection coating for solar cell passivation resistant to pid effect
A solar cell, passivation reduction technology, applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve problems such as PID failure, achieve the effect of preventing PID failure, preventing PID effect, and optimizing electrical performance
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Embodiment 1
[0015] Such as figure 1 As shown, a solar cell passivation anti-reflection film capable of resisting the PID effect, the bottom layer of the passivation anti-reflection film is a passivation anti-reflection layer 1, made of SiNx material, with a refractive index of 2.0-2.1 and a thickness of 70 -80nm; the top layer of the passivation anti-reflection film is the conductive layer 2, that is, the amorphous silicon layer (a:Si), with a thickness of 3-10nm.
[0016] The preparation method of the solar cell passivation anti-reflection film comprises the following steps:
[0017] a. Pretreatment of the original silicon wafer, the pretreatment includes the pre-cleaning, diffusion and post-cleaning processes of the traditional battery process;
[0018] b. Use PECVD method to coat the anti-reflection film on the diffusion surface. The bottom layer is a passivation anti-reflection layer SiNx with a refractive index of 2.0-2.1 and a thickness of 70-80nm; the top layer is a conductive lay...
Embodiment 2
[0022] Such as image 3 As shown, a solar cell passivation anti-reflection film capable of resisting the PID effect, the bottom layer of the passivation anti-reflection film is a passivation layer 1, made of SiNx material, the refractive index is 2.2-2.3, and the thickness is 9-11nm The middle layer of this passivation anti-reflection film is a conductive layer 2, i.e. an amorphous silicon layer (a: Si), with a thickness of 3-10nm; the top layer of this passivation anti-reflection film is an anti-reflection layer 3, which is made of SiNx material into, the refractive index is 2.0-2.1, and the thickness is 60-70nm.
[0023] The preparation method of the solar cell passivation anti-reflection film comprises the following steps:
[0024] a. Pretreatment of the original silicon wafer, the pretreatment includes the pre-cleaning, diffusion and post-cleaning processes of the traditional battery process;
[0025] b. Anti-reflective coating is plated on the diffusion surface by PECVD...
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