Method for compositely controlling micro-mechanical component by ultrasonic radiation force and moment

A technology of micro-mechanical components and ultrasonic radiation, applied in the direction of micro-structure technology, micro-structure devices, manufacturing micro-structure devices, etc., can solve the problems that micro-components cannot be captured, transported and rotated at the same time

Inactive Publication Date: 2013-04-17
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the current micro-component manipulation technology is based on ultrasonic radiation force, which can only realize the capture and translation or capture and rotation around the acoustic axis of the m

Method used

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  • Method for compositely controlling micro-mechanical component by ultrasonic radiation force and moment
  • Method for compositely controlling micro-mechanical component by ultrasonic radiation force and moment
  • Method for compositely controlling micro-mechanical component by ultrasonic radiation force and moment

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with the drawings.

[0018] Such as figure 1 As shown, the ultrasonic compound manipulation system includes three components: an electronic control part, an ultrasonic transducer array and a high-speed microscopic stereo camera system. The continuous sine wave signal is generated by a multi-channel ultrasonic signal generator with programmable and adjustable parameters, and is output to the ultrasonic transducer through a high-frequency broadband linear power amplifier module. The frequency and frequency of each channel signal can be changed by the host computer system based on the PXI platform. Phase, amplitude and trigger time. The high-speed microscopic stereo camera system consists of a CCD camera, a data acquisition card and a mobile platform, which can be used to observe the movement of the micro-components and perform position calibration on the micro-components.

[0019] figure 2 It is the distrib...

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Abstract

The invention discloses a method for compositely controlling a micro-mechanical component by ultrasonic radiation force and moment. Six planar ultrasonic transducers are applied and divided into two groups; only one group of ultrasonic transducers can be used to work at the same time; three beams of planar ultrasonic waves are superposed to synthesize a two-dimensional stationary field; the micro-component is captured in a momentum trap by the ultrasonic radiation force; the two-dimensional stationary field rotates by rapidly switching the two groups of ultrasonic transducers to work, and the position and orientation of the momentum trap are changed; and the micro-component is transmitted and rotates at the same time under the common action of the ultrasonic radiation force and moment. By virtue of a high-speed microscopic camera system, the front and back positions of the micro-component are calibrated, the phases of the ultrasonic transducers are adjusted, the micro-component is transmitted back to the original position, and thus the micro-component just rotates. The method has wide application prospect in high-tech areas of manufacturing and assembling of complicated and fine micro electro mechanical systems, cell biological engineering and the like.

Description

Technical field [0001] The invention relates to a method for manipulating a micromechanical component, in particular to a method for manipulating a micromechanical component using ultrasonic radiation force and torque. Background technique [0002] As a high-tech for people to understand and transform the objective world in the microscopic field, micro-electromechanical systems are increasingly brought about by the miniaturization of the scale of its research objects, the pursuit of high-aspect-ratio three-dimensionality in manufacturing technology, and the diversification of manufacturing processes and materials. The more challenges, the more important and urgency of micro-assembly technology is reflected. Micro-manipulation technology is the core and foundation of micro-assembly. Different micro-manipulation modes will directly determine the performance and application scope of micro-assembly technology. Therefore, in the process of the development of micro-assembly technology...

Claims

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Application Information

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IPC IPC(8): B81C1/00
Inventor 吴海腾杨克己贾坤
Owner ZHEJIANG UNIV
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