Recovery system and recovery method of by-product in polycrystalline silicon production

A recovery method and technology of a recovery system, applied in the purification of halogenated silicon compounds, halogenated silanes, chlorine/hydrogen chloride, etc., can solve problems such as energy consumption reduction, save heat and cooling, save heat and cooling, and save one time Sexual investment and its effects

Active Publication Date: 2013-04-24
巴彦淖尔聚光硅业有限公司
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Problems solved by technology

[0004] Cold hydrogenation was originally a process used to prepare trichlorosilane in the early stage of the silane method, and it was directly introduced into the improved Siemens method. Although com

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  • Recovery system and recovery method of by-product in polycrystalline silicon production
  • Recovery system and recovery method of by-product in polycrystalline silicon production

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[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the specific embodiments will be described in detail below in conjunction with the accompanying drawings.

[0035] The recycling system of the present invention is used for recycling hydrogen, chlorosilane and hydrogen chloride gas in the reduction tail gas generated during the production of polysilicon. Such as figure 2 As shown, the recovery system of the present invention may include: a first condensation unit, an adsorption unit directly connected to the first condensation unit, and a cold hydrogenation reactor connected to the adsorption unit. The first condensing unit can separate most of the chlorosilane in the reduced tail gas through condensation. The reduction tail gas from which most of the chlorosilanes are removed in the first condensation unit enters the adsorption unit. After removing the remaining chlorosilane and all hydrogen chloride in the ...

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Abstract

The invention discloses a recovery system and a recovery method of a by-product in polycrystalline silicon production. The system and the method are used for recycling the hydrogen, chlorosilane and chlorine hydride gas in the reducing tail gas produced during the polycrystalline silicon production. The recovery method comprises the following steps: a condensing step for separating most of chlorosilane from the reducing tail gas; an adsorption step for removing all chlorine hydride and the rest chlorosilane from the reducing tail gas by using an absorption unit after the condensing step to obtain the pure hydrogen; a regenerating step for regenerating the absorption unit by using the hydrogen so as to remove the chlorosilane and chlorine hydride absorbed by the absorption unit, and obtaining the regenerative gas containing hydrogen, chlorosilane and chlorine hydride; and a cold hydrogenating step for directly feeding the regenerative gas as the raw material of the cold hydrogenation reaction to a cold hydrogenation reactor. According to the system and method provided by the invention, the HCl can be singly separated from the tail gas without an adsorption-de-adsorption device so as to prevent the HCl from being condensedly separated and gasified, and a great number of heat and cooling capacity is saved.

Description

technical field [0001] The invention relates to the field of polysilicon production, in particular to a recovery system and recovery method for by-products in polysilicon production. Background technique [0002] At present, more than 80% polysilicon enterprises at home and abroad adopt the improved Siemens method, but due to the low conversion rate of silicon tetrachloride and high energy consumption in the thermal hydrogenation process, some polysilicon manufacturing enterprises have replaced it with cold hydrogenation process Traditional thermal hydrogenation is used to realize the closed cycle of chlorosilane in the production system, and achieve the purpose of saving energy and reducing consumption. [0003] Recovery systems for the by-products of polycrystalline production are widely used, such as figure 1 shown. The by-product reduction tail gas including hydrogen, chlorosilane and hydrogen chloride produced during polysilicon production is sent to the first condens...

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Application Information

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IPC IPC(8): C01B3/56C01B33/107C01B7/07
Inventor 齐林喜
Owner 巴彦淖尔聚光硅业有限公司
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