Magnetic levitation vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling

Abstract

The invention discloses a magnetic levitation vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and an air flotation plate are born by a magnetic levitation thrust bearing, a piston sleeve and the sleeve are respectively lubricated and supported by an air flotation surface, the freedom of the horizontal linear motion between an upper installation plate and a lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a two-dimensional flexible hinge, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The magnetic levitation vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively meet the high-performance requirements of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

Description

technical field [0001] The invention belongs to the technical field of precision vibration isolation, and mainly relates to a magnetic suspension vibration isolator with coplanar air suspension orthogonal decoupling and two-dimensional flexible hinge angle decoupling. Background technique [0002] With the continuous improvement of ultra-precision machining and measurement accuracy, environmental vibration has become an important factor restricting the improvement of the accuracy and performance of ultra-precision machining equipment and measuring instruments. In particular, the ultra-large-scale integrated circuit processing equipment represented by the step-scan lithography machine is extremely technically intensive and complex, and the key technical indicators have reached the limit of the existing technology, representing the highest level of ultra-precision processing equipment. Precision vibration isolation has become the core key technology in this type of equipment; ...

AI Technical Summary

Problems solved by technology

The problems of this method are as follows: 1) Due to the constraints of material properties and structural stiffness, the amplitude of vertical and horizontal stiffness reduction of the vibration isolator is limited; 2) The vertical and horizontal positioning accuracy of the air spring vibration isolator is very poor, It cannot meet the requirements of the photolithography process; 3) To achieve a lower horizontal stiffness requires a larger pendulum length, resulting in excessive height of the vibration isolator, prone to string-film resonance, and poor stability

The problems of this solution are: 1) In the disclosed technical solution, the vibration isolator cannot achieve precise positioning; 2) In the patent EP1803965A2, there is no degree of freedom of angular movement around the horizontal axis between the upper and lower mounting plates. The angular stiffness and natural frequency are very high; patents EP1803970A2 and US20080193061A1 use rubber blocks to provide angular freedom of rotation around the horizontal axis for the upper and lower mounting plates, but due to the high angular stiffness of the rubber blocks, the angular freedom of motion cannot be effectively achieved Degree decoupling, the friction between the decoupling mechanism components of the angular motion freedom introduces additional stiffness, which restricts the vibration isolation performance

However, the proposed technical solution still does not solve the problem of decoupling the precise positioning of the vibration isolator and the angular motion freedom of the upper and lower mounting plates.

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