On-chip temperature sensor

Abstract

The invention relates to the technical field of semiconductors and provides an on-chip temperature sensor. The on-chip temperature sensor comprises a basic circuit unit, a chopped wave unit, a resistor trimming unit, an electric fuse array and a resistance (R) and capacity (C) R-C filtering network. Offset voltage, misfitting and noise of an imperfect factor of the temperature sensor are eliminated by the chopped wave unit. Further improvement of precision is achieved by further adopting the resistor trimming unit at the same time. A required control bit of the resistor trimming unit is integrated in a chip by the electric fuse array, packaging cost is effectively controlled, and thus high integration level of a device is guaranteed. Besides, normalization of output voltage is achieved through the R-C filtering network by the on-chip temperature sensor, thus the on-chip temperature sensor of high precision that technology influence is eliminated and output result is consistent on different chips is obtained.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to the on-chip temperature sensor technology. Background technique [0002] In modern life, the detection and monitoring of temperature information has always been the focus of attention, especially in areas closely related to daily life such as food, medical care, and hygiene. Therefore, chips and products for detecting and controlling temperature have a wide range of applications, and temperature sensor products as the core technology are also diverse. Such as thermocouples used for off-chip temperature detection, on-chip temperature sensors that use the PN junction temperature characteristics of triodes to achieve temperature detection, etc. [0003] Compared with the on-chip temperature sensor, the off-chip temperature sensor has higher precision and accuracy. However, because it is outside the chip, it occupies a large area. bottleneck. In addition, due to the large t...

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Problems solved by technology

However, once the chip temperature changes, the consistent output results at the original set temperature may still have a large difference at the new temperature, and even produce a larger accuracy deviation than that without resistance trimming.

[0007] In addition, the use of resistor trimming technology requires more control bits to control the size of the resistor. If all the control bits are led out of the chip, the packaging cost will be greatly increased.

At the same time, the introduction of too many control bits will undoubtedly introduce more noise for high-precision circuit design, which further affects the accuracy of the on-chip temperature sensor and the overall circuit.

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