Method and device for vacuum cavity leakage detection for sensors with vacuum reference cavities

A technology of vacuum chamber and reference chamber, which is applied in the direction of liquid tightness measurement by using liquid/vacuum degree, and by measuring the increase and deceleration rate of fluid, can solve the problems of low detection efficiency, missed detection, low detection accuracy, etc., and achieve The effect of improving production efficiency, high detection accuracy, and improving accuracy and reliability

Inactive Publication Date: 2013-04-24
TAIYUAN AERO INSTR
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Problems solved by technology

[0003] The present invention aims to solve the problems of low detection accuracy and missing detection phenomenon of the existing l

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  • Method and device for vacuum cavity leakage detection for sensors with vacuum reference cavities
  • Method and device for vacuum cavity leakage detection for sensors with vacuum reference cavities
  • Method and device for vacuum cavity leakage detection for sensors with vacuum reference cavities

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Embodiment

[0039] Embodiment: A method for vacuum chamber leak detection for a vibrating cylinder pressure sensor.

[0040] 1. Purpose of the test

[0041] The high-precision vibrating cylinder sensor is an absolute pressure sensor. The stability of the vacuum degree of its vacuum chamber is one of the important factors determining the stability of the sensor. Therefore, it is necessary to ensure that the vacuum chamber of the sensor does not leak during the manufacturing process. At present, in the production process of the sensor, the sealing of the vacuum chamber depends on 2 months of storage, and the assessment method of measuring the cycle change of the sensor before and after storage is checked. The cycle of this process is about 70 days, which is not conducive to the improvement of production efficiency. Leak rate assessment is not sufficient. Therefore, the purpose of this test is to reduce the time for vacuum chamber leak detection, improve production efficiency, and improve t...

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Abstract

The invention belongs to the technical field of a detecting method for sensors, and particularly relates to a method and a device for vacuum cavity leakage detection for sensors with vacuum reference cavities. The method solves the problems that an existing leakage detecting method for the sensors with the vacuum reference cavities is low in detection accuracy and not free of missed detection, and only capable of detecting a single product and low in detection efficiency. The detecting method comprises the following steps: measuring output signals for products needing to be detected; and placing a plurality of the products into a pressuring tank, sealing the pressuring tank, evacuating air in the pressuring tank, filling helium into the pressuring tank, maintaining the pressure, evacuating the helium, measuring output signals of the products, and then comparing the output signals before and after the pressuring. The device comprises the pressuring tank capable of containing the plurality of the products to be detected, wherein the pressuring tank is provided with pipelines to be connected with a helium tank, a pressure instrument, a pressure switch and a vacuum pump. The device for the vacuum cavity leakage detection for the sensors with the vacuum reference cavities has the advantages of being high in detection accuracy rate, shortening the period of technical processes and being suitable for mass production.

Description

technical field [0001] The invention belongs to the technical field of sensor detection methods, and in particular relates to a sensor vacuum chamber leak detection method with a vacuum reference chamber and equipment thereof. Background technique [0002] The existing leak detection methods for sensors with vacuum reference chambers usually use helium simple leak detectors. Due to the limitation of the leak detection accuracy of helium simple leak detectors, the detection accuracy of products is low, and there is a phenomenon of missed detection; only a single Only product detection, detection efficiency is low. Another detection method is to store the sensor with a vacuum reference chamber for two months, and compare the output cycle changes of the sensor before and after storage. This method has a high detection accuracy, but the process cycle is long, and it needs to be stored for 2 months or longer. time. Contents of the invention [0003] The invention aims to solv...

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Application Information

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IPC IPC(8): G01M3/32
Inventor 苏莉芳张中飞
Owner TAIYUAN AERO INSTR
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