Operating temperature self-adjusting system of high repetition frequency industrial excimer laser
An excimer laser, working temperature technology, used in lasers, phonon exciters, laser parts and other directions, can solve the problem of output characteristics changing with working temperature, and achieve the effect of reducing equipment damage and improving laser output power
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[0020] Such as figure 1 Shown. A self-adjusting system for working temperature of excimer laser for high repetition frequency industry. It includes a laser discharge cavity 1. A pair of discharge electrodes 14, a cooling water pipe 4, and a temperature sensor 7 are arranged in the laser discharge cavity 1. A capacitor is connected between the two discharge electrodes 14 2. The capacitor 2 is connected to the external charging power source 3 through a wire, and the cooling water pipe 4 is connected to a circulating water pump 5 and a condenser 6 through a pipeline to form a circulating cooling water circuit. It also includes a temperature self-adjusting circuit 8, a temperature sensor 7, a circulation The water pump 5 and the condenser 6 are respectively connected to the temperature self-adjusting circuit 8.
[0021] Such as figure 2 Shown. The temperature self-adjusting circuit 8 is composed of an analysis and comparison circuit 12, a signal sampling circuit 11 connected to the...
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