Operating temperature self-adjusting system of high repetition frequency industrial excimer laser
An excimer laser, working temperature technology, used in lasers, phonon exciters, laser parts and other directions, can solve the problem of output characteristics changing with working temperature, and achieve the effect of reducing equipment damage and improving laser output power
Inactive Publication Date: 2013-05-01
ANHUI INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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The invention discloses an operating temperature self-adjusting system of a high repetition frequency industrial excimer laser. A temperature self-adjusting system which consists of a circulating water pump, a condenser, a temperature sensor, a temperature self-adjusting circuit, control software, a database which includes laser working states and parameters and the like is additionally arranged in an excimer laser system. The temperature self-adjusting system is used to control the operating temperature of the laser according to the laser operating parameters and states when the laser works, and accordingly, the inner temperature of a laser cavity body is controlled within the optimum energy scope so as to obtain the optimum output energy.
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