Operating temperature self-adjusting system of high repetition frequency industrial excimer laser

[0020] Such as figure 1 Shown. A self-adjusting system for working temperature of excimer laser for high repetition frequency industry. It includes a laser discharge cavity 1. A pair of discharge electrodes 14, a cooling water pipe 4, and a temperature sensor 7 are arranged in the laser discharge cavity 1. A capacitor is connected between the two discharge electrodes 14 2. The capacitor 2 is connected to the external charging power source 3 through a wire, and the cooling water pipe 4 is connected to a circulating water pump 5 and a condenser 6 through a pipeline to form a circulating cooling water circuit. It also includes a temperature self-adjusting circuit 8, a temperature sensor 7, a circulation The water pump 5 and the condenser 6 are respectively connected to the temperature self-adjusting circuit 8.

[0021] Such as figure 2 Shown. The temperature self-adjusting circuit 8 is composed of an analysis and comparison circuit 12, a signal sampling circuit 11 connected to the analysis and comparison circuit 12, and an amplification output control circuit 13 respectively.

[0022] The temperature sensor 7 is connected to the signal sampling circuit 11 in the temperature self-regulating circuit 8.

[0023] The circulating water pump 5 and the condenser 6 are respectively connected to the amplified output control circuit 13 in the temperature self-regulating circuit 8.

[0024] The analysis and comparison circuit in the temperature self-adjusting circuit 8 is connected to an external upper computer. The external upper computer is provided with a control software 9 and a database 10 containing laser working status and parameters.

[0025] Excimer laser working temperature self-adjusting system includes laser discharge output cavity 1, discharge capacitor 2, charging power supply 3, cooling water pipe 4, circulating water pump 5, condenser 6, temperature sensor 7, temperature self-adjusting circuit 8, control software 9 And a database 10 containing laser working status and parameters. The temperature self-adjusting circuit 8 is composed of a signal sampling circuit 11, an analysis and comparison circuit 12, and an amplified output control circuit 13. In addition, the signal sampling circuit 11, the analysis and comparison circuit 12, and the amplified output control circuit 13 are connected in sequence. The input terminal of the signal sampling circuit 11 is connected to the temperature sensor 7 in the laser discharge output cavity 1 to collect the temperature change of the laser discharge output cavity 1. The output terminal of the amplified output control circuit is connected to the circulating water pump 5 and the condenser 6 to control the flow rate and temperature into the circulating cooling water circuit.

[0026] When the excimer laser system is working, there is a certain relationship between the temperature in the cavity and the output energy, such as image 3 As shown, when the temperature in the cavity is at a certain value T 0 When, its output energy is the best. Therefore, the temperature in the laser cavity is controlled within the optimal energy range through the temperature self-adjusting system, and the optimal output energy can be obtained. Figure 4 The relationship between the operating temperature of the excimer laser and the operating time is given. Curve a is the relationship between the temperature in the laser discharge output cavity 1 and the operating time of the laser when there is no cooling cycle system. It can be seen that the rapid charge and discharge of the discharge capacitor and the electrode The instantaneous discharge will cause the temperature in the laser discharge output cavity 1 to rise rapidly and exceed the optimum temperature T 0. Curve b is the desired effect of the present invention. With the operation of the laser, the temperature in the laser discharge output cavity 1 through the temperature self-regulating system is at T 0 nearby. The specific process is that the temperature sensor 7 monitors the temperature in the laser discharge output cavity 1 in real time and converts the temperature signal into an electrical signal. The electrical signal is collected by the signal sampling circuit 11 and input to the analysis and comparison circuit 12, and the signal is analyzed and compared and fed back to the amplification The output control circuit 13 controls the circulating water pump 7 and the condenser 6 to control the flow rate and temperature entering the circulating cooling water circuit, thereby achieving the function of adjusting the working temperature of the laser. The temperature self-adjusting circuit is controlled by the control software, and a database containing the laser working status and parameters is added. When the laser is working, the system will use the temperature self-adjusting system to control the laser working temperature according to the laser working parameters and status in the database. The temperature in the laser cavity is controlled within the optimal energy range to obtain the optimal output energy.