System for single crystal furnace vacuum dedusting filtration

Abstract

The invention discloses a system for single crystal furnace vacuum dedusting filtration, which comprises a safety inflation valve, a filtering tank cover, a filtering tank body, a honeycomb ultrafine fiber paper, an aluminium alloy inner cylinder, an air inlet and an air outlet; the open-type filtering tank cover is disposed on the filtering tank body; the safety inflation valve is disposed on the filtering tank cover; the aluminium alloy inner cylinder is disposed in the filtering tank body; the honeycomb ultrafine fiber paper is fixed on the aluminium alloy inner cylinder; the air outlet is disposed below the filtering tank body; the air inlet is disposed on the side surface of the filtering tank body. According to the invention, the honeycomb ultrafine fiber paper is used as a filtering medium to filter finer impurities, and the honeycomb structure can greatly increase the air passing area, and improve air passing efficiency. The invention has very important significance on the filtration of more and smaller impurities, the reduction of the vacuum pump oil using amount, the prolongation of the vacuum pump service life, and the improvement of the vacuum degree in the single crystal furnace.

Description

[0001] technical field [0002] The invention relates to the field of solar photovoltaics, in particular to a device for vacuum dust removal and filtration of a single crystal furnace. Background technique [0003] When growing a single crystal, the vacuum requirement is high, and each single crystal furnace is equipped with an independent vacuum pump for vacuuming. While evacuating, high-purity argon is continuously filled as a protective gas to prevent silicon from reacting with oxygen and carbon at high temperatures. However, high-purity argon still contains a small amount of oxygen, and the air leakage caused by the poor sealing effect of the single crystal furnace itself, as well as the quartz crucible and graphite system used for single crystal growth, will generate or release silicon dioxide and carbonization. Impurities such as silicon. These impurities are pumped out by the vacuum pump along with the argon to keep the vacuum in the single crystal furnace. After t...

AI Technical Summary

Problems solved by technology

After these impurities enter the vacuum pump, the service life of the vacuum pump will be greatly reduced, and the vacuum pump oil must be replaced frequently, which is expensive

The vacuum dust removal and filtration system currently used is a single-layer stainless steel filter, which can only filter impurities with large particles, but cannot filter small impurities; and the filter area is small and easy to block, which increases the load of the vacuum pump.

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