Full-automatic downward transmission system

Abstract

The invention belongs to the field of transmission system for PECVD (plasma enhanced chemical vapor deposition), and particularly relates to a full-automatic downward transmission system. The full-automatic downward transmission system comprises a charging platform, a lifting transmission, a downward transmission system and a discharging platform, wherein the downward transmission system comprises four transmission stations, a solid-state relay and a PLC (programmable logic controller), wherein each transmission station is composed of a motor, a sensor and a transmission profile, and the motor and the sensor are arranged on the transmission profile; the PLC is electrically connected with the sensors and the solid-state relay; and the solid-state relay is electrically connected with each motor. Carbon plates are transmitted on the downward transmission system composed of the 4 transmission stations, thereby overcoming the defects of low transmission stability and the like in the transmission system composed of 8 transmission stations, and lowering the fragment rate. Since the equipment components are reduced, the cost is lowered.

Description

technical field [0001] The invention belongs to the field of PECVD transmission system, in particular to a fully automatic lower transmission system. Background technique [0002] With the rapid development of economic construction, microelectronics technology has developed rapidly, and the development and use of PECVD plasma processing equipment has become increasingly widespread. PECVD is the plasma enhanced chemical vapor deposition method. During chemical vapor deposition, in order to make the chemical reaction proceed at a lower temperature, the activity of the plasma can be used to promote the reaction. This chemical vapor deposition method is called plasma Volume-enhanced chemical vapor deposition method, the equipment for implementing this processing method is PECVD equipment. [0003] At present, the PECVD transmission system of our battery production line includes a loading platform, a lifting transmission, a lower transmission line, and an unloading platform. The...

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Problems solved by technology

[0003] At present, the PECVD transmission system of our battery production line includes a loading platform, a lifting transmission, a lower transmission line, and an unloading platform. The lower transmission line is composed of a general control power switch, a motor, a photoelectric sensor, and profiles, while the traditional lower transmission is mostly 8. The transmission station is connected. The transmission system usually has 8 sets of on-shooting sensors and 8 motors. When the carbon plate is transmitted on the lower transmission, there are disadvantages such as high cost and poor stability.

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