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Preparation method of molybdenum-niobium alloy plate for target material

A technology of molybdenum-niobium alloy and target material, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of low density and high impurity content, and achieve the effect of low cost

Active Publication Date: 2013-06-12
NINGXIA ORIENT TANTALUM IND
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The powder sintering method makes the target material uniform in composition, but there are problems such as low density and high impurity content

Method used

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  • Preparation method of molybdenum-niobium alloy plate for target material
  • Preparation method of molybdenum-niobium alloy plate for target material

Examples

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Embodiment 1

[0021] First, molybdenum powder and niobium powder are prepared. In this example, molybdenum powder with an average particle size of less than 10 μm and niobium powder with an average particle size of less than 200 mesh are used. Put the molybdenum powder and niobium powder in the mixer according to the mass ratio of 10:90 and mix them for 24 hours to obtain the mixed powder. The mixed powder is pressed into an alloy billet through a hydraulic press. The forming pressure of the hydraulic press is controlled at 80 tons, and then a horizontal Vacuum sintering furnace is used for sintering. During the sintering process, hydrogen gas is introduced for protection. The heating rate during sintering is controlled at 10°C / min. When the sintering temperature reaches 1000°C, it is kept for 2.5 hours, and then the temperature is raised to 1700°C for 2.5 hours, and then the temperature is raised to 1950°C. Heat preservation for 9 hours, finally sintered into an alloy billet, and then go th...

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Abstract

The invention relates to a preparation method of a molybdenum-niobium alloy plate for a target material. The preparation method is characterized by comprising the following steps: mixing molybdenum powder and niobium powder at a mass ratio of (5-15): (85-95) to obtain mixed powder; pressing the mixed powder to obtain an alloy blank, sintering, filling hydrogen to protect in the sintering process, preserving heat for 2-3 hours when the sintering temperature is at 1000 DEG C, increasing the temperature to 1700 DEG C, preserving the heat for 2-3 hours, increasing the temperature to 1950 DEG C, preserving the heat for 8-10 hours, and finally sintering to obtain the alloy blank form; and sintering at high temperature of 1200-1400 DEG C, and rolling into the plate at 1500-1600 DEG C. The invention provides a new method of the molybdenum-niobium alloy plate for the target material, which is low in cost and is capable of meeting demands on quality and other various aspects; and the alloy plate is mainly applicable to a flat-panel display and other fields.

Description

technical field [0001] The invention relates to a method for preparing a molybdenum-niobium alloy plate for a target. Background technique [0002] Molybdenum-niobium alloy plate target has high melting point, high temperature strength and high temperature toughness, as well as heat resistance, thermal conductivity and electrical conductivity, and small thermal expansion coefficient. Compared with the pure molybdenum target, adding a certain proportion of niobium to the molybdenum can increase or expand the pixels of the liquid crystal display frequency by more than two times, so that the large display screen with long electrodes has high definition, high information capacity and high resolution. [0003] Molybdenum alloy target is used as a material for preparing flat-panel display metal electrodes, and the market demand is large, and the global market is about 10 billion yuan per year. Molybdenum sputtering target is an emerging and high-end product in the molybdenum indu...

Claims

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Application Information

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IPC IPC(8): C22C27/02C22C1/03C23C14/14C23C14/34B22F3/16
Inventor 杨国启扈百直孙本双王东新钟景明李彬李海军吴红罗丹刘创红刘兆刚李军义岳坤郑金凤孙磊
Owner NINGXIA ORIENT TANTALUM IND
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