Single-cavity dual-electrode discharge cavity based on improved cross-flow fan impellers
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A discharge cavity and two-electrode technology, applied in the field of lasers, can solve the problems of complex manufacturing process and operation method, high laser price, complex system structure, etc., and achieve the effects of ensuring discharge synchronization, simplifying the laser system, and reducing noise.
Active Publication Date: 2013-06-12
RAINBOW SOURCE LASER RSLASER
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[0021] Aiming at the disadvantages of MOPA, MOPRA, and MOPO system structures used in existing dual-cavity excimer lasers, the technical problem to be solved by the present invention is to propose a new type of single-cavity double-electrode discharge cavity and corresponding lasers to solve the problem based on dual-cavity The structural laser has the disadvantages of high price, large volume, complicated manufacturing process and operation method, and can achieve narrow linewidth and high-power high-quality laser beam output
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[0026] According to a preferred embodiment of the present invention, each set of main discharge electrodes includes an anode and a cathode, and a discharge area is formed between the anode and the discharge surface of the cathode.
[0027] According to a preferred embodiment of the present invention, the cathode is installed on an insulating plate, and the insulating plate is hoisted on the top of the left and right chambers; the anode is fixed on an anode base, and the anode base It is fixed on the cavity, and its position is such that the anode is parallel to and directly opposite to the cathode.
[0028]According to a preferred embodiment of the present invention, it also includes a bead and a peaking capacitor, and the peaking capacitor is used for discharging and storing energy; the insulating plate is fixed to the discharge chamber through the bead; The outer side of the board, and communicate with one end of the peaking capacitor, and form a ground loop with the cavity....
specific Embodiment approach
[0054] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0055] 1. Basic structure of a single-chamber double-electrode discharge chamber
[0056] Figure 4 It is a structural diagram of a single-chamber double-electrode discharge chamber according to an embodiment of the present invention. Such as Figure 4 As shown, the discharge chamber mainly includes a discharge chamber body 1 , two sets of main discharge electrodes, two sets of gas circulation systems, a heat dissipation system, a dust removal device and a high-voltage pulse charging module 4 .
[0057] The discharge chamber body 1 is a closed gas container, which is designed to implement the relevant standards of pressure vessels, and is used to store 3-6 atm corrosive mixed gases, such as halogen gases that produce ex...
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Abstract
The invention belongs to the technical field of lasers and particularly relates to a single-cavity dual-electrode discharge cavity and an excimer laser adopting the discharge cavity. The discharge cavity comprises a cavity body and two sets of main discharge electrodes, wherein the cavity body comprises a left chamber and a right chamber so as to form a symmetrical dual-chamber structural cavity shape, the cross section of each chamber is of a pear shape with a small upper part and a big down part, the left chamber and the right chamber are in junction and communication at a symmetrical plane of the whole discharge cavity, and the two sets of main discharge electrodes are respectively located at the upper sides of the left and right chambers. Two fan impellers are arranged in the cavity body so as to drive air, and then, the air passing through a discharge region is enabled to be fresh air; and the fan impellers are cross-flow fan impellers. According to the discharge cavity, the functions of two cavities are realized by a single-cavity structure, so that the complexity of a system is reduced, and the discharge synchronization of the discharge cavity is guaranteed; and meanwhile, due to the layout manner for vanes of the impellers adopted in the discharge cavity, the axial uniformity of fans can be improved, and the noises of fan systems are reduced.
Description
technical field [0001] The invention belongs to the technical field of lasers, and in particular relates to a single-cavity double-electrode discharge chamber of an excimer laser, in particular to a single-cavity double-electrode discharge chamber based on an improved cross-flow fan impeller. The discharge chamber of the present invention can also be applied to other devices in which gas is excited to generate energy radiation. Background technique [0002] Excimer laser is a conventional gas laser for ultraviolet characteristic applications. It is currently considered to be the best light source choice for lithography, and it is the main working light source in the integrated circuit lithography lithography industry. [0003] Traditional discharge excited excimer lasers are designed with a single-cavity single-electrode structure. With the further development of optical lithography technology, the light source is required to have narrower spectral width (linewidth), higher...
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