Tangent drive type microsecond-level high-precision angle adjusting mechanism
An angle adjustment and driving technology, applied in the direction of using feedback control, etc., can solve the problems of non-dynamic adjustment, backlash, precision shafting or low measurement accuracy of deflection table, etc., to improve sensitivity and accuracy, and improve angle adjustment accuracy , No effect of mechanical friction
Inactive Publication Date: 2015-07-15
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology
However, the grooved crystal is a fixed structure, and the parallelism of the two crystals is guaranteed by processing, and cannot be adjusted dynamically during use; the measurement accuracy is not high when using a precision shafting or deflection table, and the drive adjustment process has disadvantages such as backlash clearance.
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[0029] Taking a cosine flexible hinge as an example, the technical scheme of the present invention is described in detail.
[0030] First of all, the cosine flexure hinge is a flexure hinge with a cosine function shape cut, which can obtain accurate angular offset and the relationship between force and displacement, and obtain the deflection angle θ during use through theoretical calculations y , Θ x And θ z The exact expression of is:
[0031] θ y = 96 a M y πEh · [ 2 c ( c + t ) ( 3 c + t ) ( 2 c + t ) 2 ( 4 ct + t 2 ) 2 + ( 6 c 2 + 4 ct + t 2 ) arctan ( 4 c + t t ) ( 4 ct + t 2 ) 5 2 ]
[0032] θ x = 96 a M x πG h 3 · arctan ( 4 c + t t ) 4 ct + t 2
[0033] θ z = 96 a M z πE h 3 ...
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The invention provides a tangent drive type microsecond-level high-precision angle adjusting mechanism which can realize microsecond-level zero clearance dynamic adjustments of pitch angles, roll angles and swing angles of two crystals in a synchrotron radiation double-crystal monochromator so as to provide high-quality synchronous radiation light needed by tests. An upper plate and a lower plate are connected through a flexible hinge to form a flexible joint adjusting rotation of the adjusting mechanism. The upper plate, the flexible hinge and the lower plate convert micro-moving of a straight displacement feeding mechanism into tiny deflection rotation of the angle of the lower plate. A spring restoration mechanism is adopted to provide restoration deflecting force. When a straight line shifter moves forward a certain distance, push force provided by the straight line shifter, pressure of a spring and force enabling the flexible hinge to deflect form a balancing force system, and the flexible hinge drives the lower plate to deflect in a forward direction. When the straight line shifter draws back, the pressure of the spring, the push force provided by the straight line shifter and the force enabling the flexible hinge to deflect form a balancing force system, and the flexible hinge drives the lower plate to deflect in a backward direction.
Description
Technical field [0001] The invention belongs to the field of precision machinery, and in particular relates to a tangent drive type angle fine adjustment mechanism. Background technique [0002] The main function of the tangent-driven microsecond-level high-precision angle adjustment mechanism is to fine-tune the angle of the double flat crystal of the synchrotron radiation double crystal monochromator to ensure that the parallelism of the first crystal and the second crystal is within the range required for use . The main principle of the synchrotron radiation double crystal monochromator is to use the Bragg diffraction theorem 2d×sinθ B =nλ, where d is the lattice constant of the crystal, and n is the diffraction order. In synchrotron radiation, n is generally taken as 1, by changing the Bragg angle θ B Different wavelengths λ can be obtained, thereby realizing the monochromatization of synchrotron radiation white light. During the actual use of the monochromator, the first cr...
Claims
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IPC IPC(8): G05D3/12
Inventor 江波周泗忠韩俊锋赵相国邓小国
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI